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dc.contributor.authorKazmi, Syed
dc.contributor.authorHajjaj, Amal
dc.contributor.authorHafiz, Md Abdullah Al
dc.contributor.authorDa Costa, Pedro M. F. J.
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2017-11-29T11:13:55Z
dc.date.available2017-11-29T11:13:55Z
dc.date.issued2017-11-24
dc.identifier.citationKazmi SNR, Hajjaj AZ, Hafiz MAA, Costa PMFJ, Younis MI (2017) Highly Tunable Electrostatic Nanomechanical Resonators. IEEE Transactions on Nanotechnology: 1–1. Available: http://dx.doi.org/10.1109/TNANO.2017.2777519.
dc.identifier.issn1536-125X
dc.identifier.issn1941-0085
dc.identifier.doi10.1109/TNANO.2017.2777519
dc.identifier.urihttp://hdl.handle.net/10754/626235
dc.description.abstractThere has been significant interest towards highly tunable resonators for on-demand frequency selection in modern communication systems. Here, we report highly tunable electrostatically actuated silicon-based nanomechanical resonators. In-plane doubly-clamped bridges, slightly curved as shallow arches due to residual stresses, are fabricated using standard electron beam lithography and surface nanomachining. The resonators are designed such that the effect of mid-plane stretching dominates the softening effect of the electrostatic force. This is achieved by controlling the gap-to-thickness ratio and by exploiting the initial curvature of the structure from fabrication. We demonstrate considerable increase in the resonance frequency of nanoresonators with the dc bias voltages up to 108% for 180 nm thick structures with a transduction gap of 1 $mu$ m separating them from the driving/sensing electrodes. The experimental results are found in good agreement with those of a nonlinear analytical model based on the Euler-Bernoulli beam theory. As a potential application, we demonstrate a tunable narrow band-pass filter using two electrically coupled nanomechanical arch resonators with varied dc bias voltages.
dc.description.sponsorshipThis work was supported by funding from King Abdullah University of Science and Technology (KAUST) research grant.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/document/8119846/
dc.rights(c) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
dc.subjectDoubly-clamped bridges
dc.subjectelectrostatic force
dc.subjectnanomechanical resonator
dc.subjectshallow arch
dc.subjecttunability
dc.titleHighly Tunable Electrostatic Nanomechanical Resonators
dc.typeArticle
dc.contributor.departmentMaterial Science and Engineering Program
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalIEEE Transactions on Nanotechnology
dc.eprint.versionPost-print
kaust.personKazmi, Syed
kaust.personHajjaj, Amal Z.
kaust.personHafiz, Md Abdullah Al
kaust.personDa Costa, Pedro M. F. J.
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-06-14T02:20:46Z
dc.date.published-online2017-11-24
dc.date.published-print2018-01


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