dc.contributor.author Kazmi, Syed dc.contributor.author Hajjaj, Amal dc.contributor.author Hafiz, Md Abdullah Al dc.contributor.author Da Costa, Pedro M. F. J. dc.contributor.author Younis, Mohammad I. dc.date.accessioned 2017-11-29T11:13:55Z dc.date.available 2017-11-29T11:13:55Z dc.date.issued 2017-11-24 dc.identifier.citation Kazmi SNR, Hajjaj AZ, Hafiz MAA, Costa PMFJ, Younis MI (2017) Highly Tunable Electrostatic Nanomechanical Resonators. IEEE Transactions on Nanotechnology: 1–1. Available: http://dx.doi.org/10.1109/TNANO.2017.2777519. dc.identifier.issn 1536-125X dc.identifier.issn 1941-0085 dc.identifier.doi 10.1109/TNANO.2017.2777519 dc.identifier.uri http://hdl.handle.net/10754/626235 dc.description.abstract There has been significant interest towards highly tunable resonators for on-demand frequency selection in modern communication systems. Here, we report highly tunable electrostatically actuated silicon-based nanomechanical resonators. In-plane doubly-clamped bridges, slightly curved as shallow arches due to residual stresses, are fabricated using standard electron beam lithography and surface nanomachining. The resonators are designed such that the effect of mid-plane stretching dominates the softening effect of the electrostatic force. This is achieved by controlling the gap-to-thickness ratio and by exploiting the initial curvature of the structure from fabrication. We demonstrate considerable increase in the resonance frequency of nanoresonators with the dc bias voltages up to 108% for 180 nm thick structures with a transduction gap of 1 $mu$ m separating them from the driving/sensing electrodes. The experimental results are found in good agreement with those of a nonlinear analytical model based on the Euler-Bernoulli beam theory. As a potential application, we demonstrate a tunable narrow band-pass filter using two electrically coupled nanomechanical arch resonators with varied dc bias voltages. dc.description.sponsorship This work was supported by funding from King Abdullah University of Science and Technology (KAUST) research grant. dc.publisher Institute of Electrical and Electronics Engineers (IEEE) dc.relation.url http://ieeexplore.ieee.org/document/8119846/ dc.rights (c) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works. dc.subject Doubly-clamped bridges dc.subject electrostatic force dc.subject nanomechanical resonator dc.subject shallow arch dc.subject tunability dc.title Highly Tunable Electrostatic Nanomechanical Resonators dc.type Article dc.contributor.department Material Science and Engineering Program dc.contributor.department Mechanical Engineering Program dc.contributor.department Physical Science and Engineering (PSE) Division dc.identifier.journal IEEE Transactions on Nanotechnology dc.eprint.version Post-print kaust.person Kazmi, Syed kaust.person Hajjaj, Amal Z. kaust.person Hafiz, Md Abdullah Al kaust.person Da Costa, Pedro M. F. J. kaust.person Younis, Mohammad I. refterms.dateFOA 2018-06-14T02:20:46Z dc.date.published-online 2017-11-24 dc.date.published-print 2018-01
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