Show simple item record

dc.contributor.authorHajjaj, Amal
dc.contributor.authorHafiz, Md Abdullah Al
dc.contributor.authorAlcheikh, Nouha
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2017-11-20T12:48:14Z
dc.date.available2017-11-20T12:48:14Z
dc.date.issued2017-11-03
dc.identifier.citationHajjaj AZ, Hafiz MAA, Alcheikh N, Younis MI (2017) Scalable Pressure Sensor Based on Electrothermally Operated Resonator. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/detc2017-67785.
dc.identifier.doi10.1115/detc2017-67785
dc.identifier.urihttp://hdl.handle.net/10754/626180
dc.description.abstractWe experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.
dc.publisherASME International
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662157
dc.rightsArchived with thanks to Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
dc.subjectPressure Sensor
dc.subjectResonator
dc.subjectElectrothermal Actuation
dc.subjectCooling effect
dc.titleScalable Pressure Sensor Based on Electrothermally Operated Resonator
dc.typeConference Paper
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
dc.eprint.versionPost-print
kaust.personHajjaj, Amal Z.
kaust.personHafiz, Md Abdullah Al
kaust.personAlcheikh, Nouha
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-08-06T00:00:00Z
dc.date.published-online2017-11-03
dc.date.published-print2017-08-06


Files in this item

Thumbnail
Name:
SCALABLE PRESSURE SENSOR BASED ON ELECTROTHERMALLY OPERATED RESONATOR.pdf
Size:
450.0Kb
Format:
PDF
Description:
Accepted Manuscript

This item appears in the following Collection(s)

Show simple item record