A Microbeam Resonator with Partial Electrodes for Logic and Memory Elements
Type
ArticleKAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
KAUST Grant Number
OSR-2016-CRG5-3001Date
2017-11-10Online Publication Date
2017-11-10Print Publication Date
2017-12Permanent link to this record
http://hdl.handle.net/10754/626150
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Show full item recordAbstract
We demonstrate logic and memory elements based on an in-plane clamped-clamped microbeam resonator. The micro-resonator is electrostatically actuated through a drive electrode and the motional signal is capacitively sensed at a sense electrode, while the resonance characteristics are modulated by DC voltage pulses provided at two separate partial electrodes, independent of the drive/sense electrodes. For the logic applications, we use two separate electrodes to provide DC voltages defined as the logic inputs. The high (low) motional signal at on-resonance (off-resonance) state is defined as the logic output state “1” (“0”). For the memory operation, two stable vibrational states, high and low, within the hysteretic regime are defined as the memory states, “1” and “0”, respectively. We take advantage of the split electrode configuration to provide positive and negative DC voltage pulses selectively to set/reset the memory states (“1”/“0”) without affecting the driving and sensing terminals. Excluding the energy cost for supporting electronics, these devices consume energy in 10’s of picojoules per logic/memory operations. Furthermore, the devices are fabricated using silicon on insulator (SOI) wafers, have the potential for on-chip integration, and operate at moderate pressure (~1 Torr) and room temperature.Citation
Hafiz MAA, Ilyas S, Ahmed S, Younis MI, Fariborzi H (2017) A Microbeam Resonator with Partial Electrodes for Logic and Memory Elements. IEEE Journal on Exploratory Solid-State Computational Devices and Circuits: 1–1. Available: http://dx.doi.org/10.1109/JXCDC.2017.2772338.Sponsors
This work was supported by King Abdullah University of Science and Technology (KAUST) office of sponsored research (OSR) under Award No. OSR-2016-CRG5-3001.Additional Links
http://ieeexplore.ieee.org/document/8103925/ae974a485f413a2113503eed53cd6c53
10.1109/JXCDC.2017.2772338