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Electrostatically Tunable Nanomechanical Shallow Arches

dc.contributor.authorKazmi, Syed
dc.contributor.authorHajjaj, Amal
dc.contributor.authorDa Costa, Pedro M. F. J.
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2017-11-09T06:50:41Z
dc.date.available2017-11-09T06:50:41Z
dc.date.issued2017-11-03
dc.identifier.citationKazmi, S. N. R., Hajjaj, A. Z., Costa, P. M. F. J., & Younis, M. I. (2017). Electrostatically Tunable Nanomechanical Shallow Arches. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. doi:10.1115/detc2017-67845
dc.identifier.doi10.1115/detc2017-67845
dc.identifier.urihttp://hdl.handle.net/10754/626137
dc.description.abstractWe report an analytical and experimental study on the tunability of in-plane doubly-clamped nanomechanical arches under varied DC bias conditions at room temperature. For this purpose, silicon based shallow arches are fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer on a silicon-on-insulator (SOI) wafer. The experimental results show good agreement with the analytical results with a maximum tunability of 108.14% for 180 nm thick arch with a transduction gap of 1 μm between the beam and the driving/sensing electrodes. The high tunability of shallow arches paves the ways for highly tunable band pass filtering applications in high frequency range.
dc.description.sponsorshipThis work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.
dc.publisherASME International
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662159
dc.rightsArchived with thanks to Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
dc.titleElectrostatically Tunable Nanomechanical Shallow Arches
dc.typeConference Paper
dc.contributor.departmentMaterial Science and Engineering Program
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
dc.eprint.versionPost-print
kaust.personKazmi, Syed
kaust.personHajjaj, Amal Z.
kaust.personDa Costa, Pedro M. F. J.
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-06-13T13:07:24Z
dc.date.published-online2017-11-03
dc.date.published-print2017-08-06


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