• Login
    View Item 
    •   Home
    • Research
    • Conference Papers
    • View Item
    •   Home
    • Research
    • Conference Papers
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Browse

    All of KAUSTCommunitiesIssue DateSubmit DateThis CollectionIssue DateSubmit Date

    My Account

    Login

    Quick Links

    Open Access PolicyORCID LibguideTheses and Dissertations LibguideSubmit an Item

    Statistics

    Display statistics

    Electrostatically Tunable Nanomechanical Shallow Arches

    • CSV
    • RefMan
    • EndNote
    • BibTex
    • RefWorks
    Thumbnail
    Name:
    V004T09A011-DETC2017-67845.pdf
    Size:
    2.025Mb
    Format:
    PDF
    Description:
    Accepted Manuscript
    Download
    Type
    Conference Paper
    Authors
    Kazmi, Syed
    Hajjaj, Amal cc
    Da Costa, Pedro M. F. J. cc
    Younis, Mohammad I. cc
    KAUST Department
    Material Science and Engineering Program
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2017-11-03
    Online Publication Date
    2017-11-03
    Print Publication Date
    2017-08-06
    Permanent link to this record
    http://hdl.handle.net/10754/626137
    
    Metadata
    Show full item record
    Abstract
    We report an analytical and experimental study on the tunability of in-plane doubly-clamped nanomechanical arches under varied DC bias conditions at room temperature. For this purpose, silicon based shallow arches are fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer on a silicon-on-insulator (SOI) wafer. The experimental results show good agreement with the analytical results with a maximum tunability of 108.14% for 180 nm thick arch with a transduction gap of 1 μm between the beam and the driving/sensing electrodes. The high tunability of shallow arches paves the ways for highly tunable band pass filtering applications in high frequency range.
    Citation
    Kazmi, S. N. R., Hajjaj, A. Z., Costa, P. M. F. J., & Younis, M. I. (2017). Electrostatically Tunable Nanomechanical Shallow Arches. Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. doi:10.1115/detc2017-67845
    Sponsors
    This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.
    Publisher
    ASME International
    Journal
    Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
    DOI
    10.1115/detc2017-67845
    Additional Links
    http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2662159
    ae974a485f413a2113503eed53cd6c53
    10.1115/detc2017-67845
    Scopus Count
    Collections
    Conference Papers; Physical Science and Engineering (PSE) Division; Material Science and Engineering Program; Mechanical Engineering Program

    entitlement

     
    DSpace software copyright © 2002-2023  DuraSpace
    Quick Guide | Contact Us | KAUST University Library
    Open Repository is a service hosted by 
    Atmire NV
     

    Export search results

    The export option will allow you to export the current search results of the entered query to a file. Different formats are available for download. To export the items, click on the button corresponding with the preferred download format.

    By default, clicking on the export buttons will result in a download of the allowed maximum amount of items. For anonymous users the allowed maximum amount is 50 search results.

    To select a subset of the search results, click "Selective Export" button and make a selection of the items you want to export. The amount of items that can be exported at once is similarly restricted as the full export.

    After making a selection, click one of the export format buttons. The amount of items that will be exported is indicated in the bubble next to export format.