Hafiz, Md Abdullah Al
Nanaiah, Karumbaiah Chappanda
Holguin Lerma, Jorge Alberto
Da Costa, Pedro M. F. J.
Younis, Mohammad I.
KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Integrated Circuits and Systems Group, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabia
Laboratory for Carbon Nanostructures, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabia
Material Science and Engineering Program
Mechanical Engineering Program
Nano/Micro Mechanics and Motion Laboratory, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Kingdom of Saudi Arabia
Physical Science and Engineering (PSE) Division
Online Publication Date2017-08-29
Print Publication Date2017-04
Permanent link to this recordhttp://hdl.handle.net/10754/626004
MetadataShow full item record
AbstractWe report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device is examined at elevated temperatures, ranging from 25 °C to 85 °C, demonstrating its resilience for most of the logic operations; thereby paving the way towards nano-elements-based mechanical computing.
CitationKazmi SNR, Hafiz MAA, Chappanda KN, Ilyas S, Holguin J, et al. (2017) Nanoelectromechanical resonator for logic operations. 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/nems.2017.8016963.
SponsorsThe authors would like to thank the staff of Advanced Nanofabrication Imaging and Characterization lab for their help during the fabrication of the devices. We gratefully acknowledge KAUST for funding this project.
Journal2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Conference/Event name12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017