Show simple item record

dc.contributor.authorJaber, Nizar
dc.contributor.authorIlyas, Saad
dc.contributor.authorShekhah, Osama
dc.contributor.authorEddaoudi, Mohamed
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2017-10-11T05:46:47Z
dc.date.available2017-10-11T05:46:47Z
dc.date.issued2017-08-09
dc.identifier.citationJaber N, Ilyas S, Shekhah O, Eddaoudi M, Younis MI (2017) Sensitive resonant gas sensor operating in air with metal organic frameworks coating. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Available: http://dx.doi.org/10.1109/TRANSDUCERS.2017.7994240.
dc.identifier.doi10.1109/TRANSDUCERS.2017.7994240
dc.identifier.urihttp://hdl.handle.net/10754/625848
dc.description.abstractWe report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/document/7994240/
dc.rights(c) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
dc.subjectelectrostatic actuation
dc.subjectGas detection
dc.subjectselectivity and resonators
dc.titleSensitive resonant gas sensor operating in air with metal organic frameworks coating
dc.typeConference Paper
dc.contributor.departmentAdvanced Membranes and Porous Materials Research Center
dc.contributor.departmentChemical Science Program
dc.contributor.departmentFunctional Materials Design, Discovery and Development (FMD3)
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journal2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
dc.conference.date2017-06-18 to 2017-06-22
dc.conference.name19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
dc.conference.locationKaohsiung, TWN
dc.eprint.versionPost-print
kaust.personJaber, Nizar
kaust.personIlyas, Saad
kaust.personShekhah, Osama
kaust.personEddaoudi, Mohamed
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-06-13T18:56:24Z
dc.date.published-online2017-08-09
dc.date.published-print2017-06


Files in this item

Thumbnail
Name:
Nizar Transducer .pdf
Size:
830.0Kb
Format:
PDF
Description:
Accepted Manuscript

This item appears in the following Collection(s)

Show simple item record