Optimization of Monochromated TEM for Ultimate Resolution Imaging and Ultrahigh Resolution Electron Energy Loss Spectroscopy

Lopatin, Sergei; Cheng, Bin; Liu, Wei-Ting; Tsai, Meng-Lin; He, Jr-Hau; Chuvilin, Andrey

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Article

Authors

Lopatin, Sergei

Cheng, Bin
Liu, Wei-Ting
Tsai, Meng-Lin

He, Jr-Hau

Chuvilin, Andrey

KAUST Department

Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Electron Microscopy
Imaging and Characterization Core Lab
KAUST Solar Center (KSC)

Date

2017-09-01

Online Publication Date

2017-09-01

Print Publication Date

2018-01

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http://hdl.handle.net/10754/625753

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Abstract

The performance of a monochromated transmission electron microscope with Wien type monochromator is optimized to achieve an extremely narrow energy spread of electron beam and an ultrahigh energy resolution with spectroscopy. The energy spread in the beam is improved by almost an order of magnitude as compared to specified values. The optimization involves both the monochromator and the electron energy loss detection system. We demonstrate boosted capability of optimized systems with respect to ultra-low loss EELS and sub-angstrom resolution imaging (in a combination with spherical aberration correction).

Citation

Lopatin S, Cheng B, Liu W-T, Tsai M-L, He J-H, et al. (2018) Optimization of monochromated TEM for ultimate resolution imaging and ultrahigh resolution electron energy loss spectroscopy. Ultramicroscopy 184: 109–115. Available: http://dx.doi.org/10.1016/j.ultramic.2017.08.016.