Synthesis of SiOC:H nanoparticles by electrical discharge in hexamethyldisilazane and water
KAUST DepartmentClean Combustion Research Center
Advanced Membranes and Porous Materials Research Center
Advanced Nanofabrication and Thin Film Core Lab
Imaging and Characterization Core Lab
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AbstractNanoparticles have unique properties and are useful in many applications. Efficient synthesis of high yields of nanoparticles remains a challenge. Here, we synthesized SiOC:H, a low-dielectric-constant material, by electrical discharge at the interface of hexamethyldisilazane and water. The nanoparticle production rate of our technique was ∼17 mg per minute. We used Fourier transform infrared spectroscopy, scanning and transmission electron microscopy, and X-ray photoemission spectroscopy to characterize the synthesized material. Heating the nanoparticles to 500 °C for 2 h released hydrogen from CHx groups and evaporated volatile compounds. Our method to produce high yields of low-dielectric-constant nanoparticles for microelectronic applications is promising.
CitationHamdan A, Abdul Halim R, Anjum D, Cha MS (2017) Synthesis of SiOC:H nanoparticles by electrical discharge in hexamethyldisilazane and water. Plasma Processes and Polymers: e1700089. Available: http://dx.doi.org/10.1002/ppap.201700089.
SponsorsThe research reported in this publication was supported by King Abdullah University of Science and Technology (KAUST).
JournalPlasma Processes and Polymers