Synthesis of SiOC:H nanoparticles by electrical discharge in hexamethyldisilazane and water
Type
ArticleKAUST Department
Advanced Membranes and Porous Materials Research CenterChemical Science Program
Clean Combustion Research Center
Electron Microscopy
Imaging and Characterization Core Lab
Mechanical Engineering Program
Nanofabrication Core Lab
Physical Science and Engineering (PSE) Division
Date
2017-07-25Online Publication Date
2017-07-25Print Publication Date
2017-12Permanent link to this record
http://hdl.handle.net/10754/625703
Metadata
Show full item recordAbstract
Nanoparticles have unique properties and are useful in many applications. Efficient synthesis of high yields of nanoparticles remains a challenge. Here, we synthesized SiOC:H, a low-dielectric-constant material, by electrical discharge at the interface of hexamethyldisilazane and water. The nanoparticle production rate of our technique was ∼17 mg per minute. We used Fourier transform infrared spectroscopy, scanning and transmission electron microscopy, and X-ray photoemission spectroscopy to characterize the synthesized material. Heating the nanoparticles to 500 °C for 2 h released hydrogen from CHx groups and evaporated volatile compounds. Our method to produce high yields of low-dielectric-constant nanoparticles for microelectronic applications is promising.Citation
Hamdan A, Abdul Halim R, Anjum D, Cha MS (2017) Synthesis of SiOC:H nanoparticles by electrical discharge in hexamethyldisilazane and water. Plasma Processes and Polymers: e1700089. Available: http://dx.doi.org/10.1002/ppap.201700089.Sponsors
The research reported in this publication was supported by King Abdullah University of Science and Technology (KAUST).Publisher
WileyJournal
Plasma Processes and PolymersAdditional Links
onlinelibrary.wiley.com/doi/10.1002/ppap.201700089/fullae974a485f413a2113503eed53cd6c53
10.1002/ppap.201700089