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    Synthesis of SiOC:H nanoparticles by electrical discharge in hexamethyldisilazane and water

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    Type
    Article
    Authors
    Hamdan, Ahmad cc
    AbdulHalim, Rasha cc
    Anjum, Dalaver H. cc
    Cha, Min Suk cc
    KAUST Department
    Advanced Membranes and Porous Materials Research Center
    Chemical Science Program
    Clean Combustion Research Center
    Electron Microscopy
    Imaging and Characterization Core Lab
    Mechanical Engineering Program
    Nanofabrication Core Lab
    Physical Science and Engineering (PSE) Division
    Date
    2017-07-25
    Online Publication Date
    2017-07-25
    Print Publication Date
    2017-12
    Permanent link to this record
    http://hdl.handle.net/10754/625703
    
    Metadata
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    Abstract
    Nanoparticles have unique properties and are useful in many applications. Efficient synthesis of high yields of nanoparticles remains a challenge. Here, we synthesized SiOC:H, a low-dielectric-constant material, by electrical discharge at the interface of hexamethyldisilazane and water. The nanoparticle production rate of our technique was ∼17 mg per minute. We used Fourier transform infrared spectroscopy, scanning and transmission electron microscopy, and X-ray photoemission spectroscopy to characterize the synthesized material. Heating the nanoparticles to 500 °C for 2 h released hydrogen from CHx groups and evaporated volatile compounds. Our method to produce high yields of low-dielectric-constant nanoparticles for microelectronic applications is promising.
    Citation
    Hamdan A, Abdul Halim R, Anjum D, Cha MS (2017) Synthesis of SiOC:H nanoparticles by electrical discharge in hexamethyldisilazane and water. Plasma Processes and Polymers: e1700089. Available: http://dx.doi.org/10.1002/ppap.201700089.
    Sponsors
    The research reported in this publication was supported by King Abdullah University of Science and Technology (KAUST).
    Publisher
    Wiley
    Journal
    Plasma Processes and Polymers
    DOI
    10.1002/ppap.201700089
    Additional Links
    onlinelibrary.wiley.com/doi/10.1002/ppap.201700089/full
    ae974a485f413a2113503eed53cd6c53
    10.1002/ppap.201700089
    Scopus Count
    Collections
    Nanofabrication Core Lab; Articles; Advanced Membranes and Porous Materials Research Center; Imaging and Characterization Core Lab; Physical Science and Engineering (PSE) Division; Chemical Science Program; Mechanical Engineering Program; Clean Combustion Research Center

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