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    Electrothermally actuated tunable clamped-guided resonant microbeams

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    Type
    Article
    Authors
    Alcheikh, Nouha cc
    Hajjaj, Amal cc
    Jaber, Nizar cc
    Younis, Mohammad I. cc
    KAUST Department
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2017-06-11
    Online Publication Date
    2017-06-11
    Print Publication Date
    2018-01
    Permanent link to this record
    http://hdl.handle.net/10754/625606
    
    Metadata
    Show full item record
    Abstract
    We present simulation and experimental investigation demonstrating active alteration of the resonant and frequency response behavior of resonators by controlling the electrothermal actuation method on their anchors. In-plane clamped-guided arch and straight microbeams resonators are designed and fabricated with V-shaped electrothermal actuators on their anchors. These anchors not only offer various electrothermal actuation options, but also serve as various mechanical stiffness elements that affect the operating resonance frequency of the structures. We have shown that for an arch, the first mode resonance frequency can be increased up to 50% of its initial value. For a straight beam, we have shown that before buckling, the resonance frequency decreases to very low values and after buckling, it increases up to twice of its initial value. These results can be promising for the realization of different wide–range tunable microresonator. The experimental results have been compared to multi-physics finite-element simulations showing good agreement among them.
    Citation
    Alcheikh N, Hajjaj AZ, Jaber N, Younis MI (2018) Electrothermally actuated tunable clamped-guided resonant microbeams. Mechanical Systems and Signal Processing 98: 1069–1076. Available: http://dx.doi.org/10.1016/j.ymssp.2017.05.049.
    Sponsors
    This research has been supported by KAUST.
    Publisher
    Elsevier BV
    Journal
    Mechanical Systems and Signal Processing
    DOI
    10.1016/j.ymssp.2017.05.049
    Additional Links
    http://www.sciencedirect.com/science/article/pii/S0888327017303102
    ae974a485f413a2113503eed53cd6c53
    10.1016/j.ymssp.2017.05.049
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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