Electrothermally actuated tunable clamped-guided resonant microbeams
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ArticleDate
2017-06-11Online Publication Date
2017-06-11Print Publication Date
2018-01Permanent link to this record
http://hdl.handle.net/10754/625606
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We present simulation and experimental investigation demonstrating active alteration of the resonant and frequency response behavior of resonators by controlling the electrothermal actuation method on their anchors. In-plane clamped-guided arch and straight microbeams resonators are designed and fabricated with V-shaped electrothermal actuators on their anchors. These anchors not only offer various electrothermal actuation options, but also serve as various mechanical stiffness elements that affect the operating resonance frequency of the structures. We have shown that for an arch, the first mode resonance frequency can be increased up to 50% of its initial value. For a straight beam, we have shown that before buckling, the resonance frequency decreases to very low values and after buckling, it increases up to twice of its initial value. These results can be promising for the realization of different wide–range tunable microresonator. The experimental results have been compared to multi-physics finite-element simulations showing good agreement among them.Citation
Alcheikh N, Hajjaj AZ, Jaber N, Younis MI (2018) Electrothermally actuated tunable clamped-guided resonant microbeams. Mechanical Systems and Signal Processing 98: 1069–1076. Available: http://dx.doi.org/10.1016/j.ymssp.2017.05.049.Sponsors
This research has been supported by KAUST.Publisher
Elsevier BVAdditional Links
http://www.sciencedirect.com/science/article/pii/S0888327017303102ae974a485f413a2113503eed53cd6c53
10.1016/j.ymssp.2017.05.049