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dc.contributor.authorRamini, Abdallah
dc.contributor.authorHajjaj, Amal
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2017-04-15T11:15:45Z
dc.date.available2017-04-15T11:15:45Z
dc.date.issued2016-12-05
dc.identifier.citationRamini A, Hajjaj A, Younis MI (2016) Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators. Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2016-59538.
dc.identifier.doi10.1115/detc2016-59538
dc.identifier.urihttp://hdl.handle.net/10754/623227
dc.description.abstractWe demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.
dc.publisherASME International
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592031
dc.subjectResonance
dc.subjectArches
dc.subjectMicroelectromechanical systems
dc.titleExperimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators
dc.typeConference Paper
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalVolume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
kaust.personRamini, Abdallah
kaust.personHajjaj, Amal Z.
kaust.personYounis, Mohammad I.
dc.date.published-online2016-12-05
dc.date.published-print2016-08-21


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