Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators
Type
Conference PaperDate
2016-12-05Online Publication Date
2016-12-05Print Publication Date
2016-08-21Permanent link to this record
http://hdl.handle.net/10754/623227
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We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.Citation
Ramini A, Hajjaj A, Younis MI (2016) Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators. Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control. Available: http://dx.doi.org/10.1115/detc2016-59538.Publisher
ASME InternationalJournal
Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and ControlAdditional Links
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592031ae974a485f413a2113503eed53cd6c53
10.1115/detc2016-59538