A nafion coated capacitive humidity sensor on a flexible PET substrate
Salama, Khaled N.
KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Advanced Nanofabrication and Thin Film Core Lab
Physical Sciences and Engineering (PSE) Division
Advanced Membranes and Porous Materials Research Center
Chemical Science Program
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AbstractThis paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert's fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current efforts in flexible substrates. Its humidity sensing properties were evaluated in an automated gas setup with a relative humidity (RH %) ranging from 15% to 95 %.
CitationSapsanis C, Buttner U, Omran H, Belmabkhout Y, Shekhah O, et al. (2016) A nafion coated capacitive humidity sensor on a flexible PET substrate. 2016 IEEE 59th International Midwest Symposium on Circuits and Systems (MWSCAS). Available: http://dx.doi.org/10.1109/MWSCAS.2016.7870020.