A nafion coated capacitive humidity sensor on a flexible PET substrate
Type
Conference PaperAuthors
Sapsanis, Christos
Buttner, Ulrich
Omran, Hesham

Belmabkhout, Youssef

Shekhah, Osama

Eddaoudi, Mohamed

Salama, Khaled N.

KAUST Department
Advanced Membranes and Porous Materials Research CenterChemical Science Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Functional Materials Design, Discovery and Development (FMD3)
Nanofabrication Core Lab
Physical Science and Engineering (PSE) Division
Sensors Lab
Date
2017-03-07Online Publication Date
2017-03-07Print Publication Date
2016-10Permanent link to this record
http://hdl.handle.net/10754/623018
Metadata
Show full item recordAbstract
This paper reports a simple and low-cost technique for fabricating low-power capacitive humidity sensors without the use of a cleanroom environment. A maskless laser engraving system was utilized to fabricate two different gold electrode structures, interdigitated electrodes and Hilbert's fifth-order fractal. The capacitive structures were implemented on a flexible PET substrate. The usage of Nafion, a well-known polymer for its hydrophilic properties as a sensing film, was attempted on the PET and outperformed the current efforts in flexible substrates. Its humidity sensing properties were evaluated in an automated gas setup with a relative humidity (RH %) ranging from 15% to 95 %.Citation
Sapsanis C, Buttner U, Omran H, Belmabkhout Y, Shekhah O, et al. (2016) A nafion coated capacitive humidity sensor on a flexible PET substrate. 2016 IEEE 59th International Midwest Symposium on Circuits and Systems (MWSCAS). Available: http://dx.doi.org/10.1109/MWSCAS.2016.7870020.Additional Links
http://ieeexplore.ieee.org/document/7870020/ae974a485f413a2113503eed53cd6c53
10.1109/MWSCAS.2016.7870020