Electrostatically actuated torsional resonant sensors and switches

Type
Patent

Patent Status
Published Application

Authors
Younis, Mohammad I.

Assignee
King Abdullah University Of Science And Technology

KAUST Department
Physical Science and Engineering (PSE) Division

Date
2016-12-29

Submitted Date
2015-06-23

Abstract
Embodiments in accordance of a torsional resonant sensor disclosure is configured to actuate a beam structure using electrostatic actuation with an AC harmonic load (e.g., AC and DC voltage sources) that is activated upon detecting a particular agent having a mass above a predefined level. In various embodiments, the beam structure may be different types of resonant structures that is at least partially coated or layered with a selective material.

Application Number
WO 2016207834 A1

Additional Links
http://www.google.com/patents/WO2016207834A1http://worldwide.espacenet.com/publicationDetails/biblio?CC=WO&NR=2016207834A1&KC=A1&FT=D

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