Water soluble nano-scale transient material germanium oxide for zero toxic waste based environmentally benign nano-manufacturing
AuthorsAlmuslem, A. S.
Kutbee, Arwa T.
Bahabry, Rabab R.
Hussain, Muhammad Mustafa
KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Integrated Disruptive Electronic Applications (IDEA) Lab
Integrated Nanotechnology Lab
Imaging and Characterization Core Lab
Materials Science and Engineering Program
Physical Sciences and Engineering (PSE) Division
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AbstractIn the recent past, with the advent of transient electronics for mostly implantable and secured electronic applications, the whole field effect transistor structure has been dissolved in a variety of chemicals. Here, we show simple water soluble nano-scale (sub-10 nm) germanium oxide (GeO) as the dissolvable component to remove the functional structures of metal oxide semiconductor devices and then reuse the expensive germanium substrate again for functional device fabrication. This way, in addition to transiency, we also show an environmentally friendly manufacturing process for a complementary metal oxide semiconductor (CMOS) technology. Every year, trillions of complementary metal oxide semiconductor (CMOS) electronics are manufactured and billions are disposed, which extend the harmful impact to our environment. Therefore, this is a key study to show a pragmatic approach for water soluble high performance electronics for environmentally friendly manufacturing and bioresorbable electronic applications.
CitationAlmuslem AS, Hanna AN, Yapici T, Wehbe N, Diallo EM, et al. (2017) Water soluble nano-scale transient material germanium oxide for zero toxic waste based environmentally benign nano-manufacturing. Applied Physics Letters 110: 074103. Available: http://dx.doi.org/10.1063/1.4976311.
SponsorsThis publication is based on the work supported by the King Abdullah University of Science and Technology (KAUST).
JournalApplied Physics Letters