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A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications

dc.contributor.authorNassar, Joanna M.
dc.contributor.authorSevilla, Galo T.
dc.contributor.authorVelling, Seneca J.
dc.contributor.authorDiaz, Marlon
dc.contributor.authorHussain, Muhammad Mustafa
dc.date.accessioned2017-02-28T11:32:08Z
dc.date.available2017-02-28T11:32:08Z
dc.date.issued2017-02-07
dc.identifier.citationNassar JM, Sevilla GAT, Velling SJ, Cordero MD, Hussain MM (2016) A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications. 2016 IEEE International Electron Devices Meeting (IEDM). Available: http://dx.doi.org/10.1109/IEDM.2016.7838448.
dc.identifier.doi10.1109/IEDM.2016.7838448
dc.identifier.urihttp://hdl.handle.net/10754/622930
dc.description.abstractWe report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/document/7838448/
dc.rights(c) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
dc.titleA CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications
dc.typeConference Paper
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentIntegrated Disruptive Electronic Applications (IDEA) Lab
dc.contributor.departmentIntegrated Nanotechnology Lab
dc.contributor.departmentMechanical Engineering Program
dc.identifier.journal2016 IEEE International Electron Devices Meeting (IEDM)
dc.eprint.versionPost-print
dc.contributor.institutionMaterial & Nanoscience Program, Faculty of Science, University of Waterloo, Waterloo ON, N2L-3G1, Canada
kaust.personNassar, Joanna M.
kaust.personSevilla, Galo T.
kaust.personDiaz, Marlon
kaust.personHussain, Muhammad Mustafa
refterms.dateFOA2018-06-14T02:25:46Z
dc.date.published-online2017-02-07
dc.date.published-print2016-12


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