A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications
AuthorsNassar, Joanna M.
Sevilla, Galo T.
Velling, Seneca J.
Cordero, Marlon D.
Hussain, Muhammad Mustafa
KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Integrated Disruptive Electronic Applications (IDEA) Lab
Integrated Nanotechnology Lab
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AbstractWe report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.
CitationNassar JM, Sevilla GAT, Velling SJ, Cordero MD, Hussain MM (2016) A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications. 2016 IEEE International Electron Devices Meeting (IEDM). Available: http://dx.doi.org/10.1109/IEDM.2016.7838448.