Show simple item record

dc.contributor.authorColuccio, Maria Laura
dc.contributor.authorAlabastri, Alessandro
dc.contributor.authorBonanni, Simon
dc.contributor.authorMajewska, Roksana
dc.contributor.authorDattoli, Elisabetta
dc.contributor.authorBarberio, Marianna
dc.contributor.authorCandeloro, Patrizio
dc.contributor.authorPerozziello, Gerardo
dc.contributor.authorMollace, Vincenzo
dc.contributor.authorDi Fabrizio, Enzo M.
dc.contributor.authorGentile, Francesco
dc.date.accessioned2017-01-15T13:40:36Z
dc.date.available2017-01-15T13:40:36Z
dc.date.issued2017-01-13
dc.identifier.citationColuccio ML, Alabastri A, Bonanni S, Majewska R, Dattoli E, et al. (2017) Surface enhanced thermo lithography. Microelectronic Engineering. Available: http://dx.doi.org/10.1016/j.mee.2017.01.004.
dc.identifier.issn0167-9317
dc.identifier.doi10.1016/j.mee.2017.01.004
dc.identifier.urihttp://hdl.handle.net/10754/622694
dc.description.abstractWe used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry.
dc.description.sponsorshipThis work has been partially funded from the Ministry of Health, Italy (Project n. GR-201s0-2320665).
dc.publisherElsevier BV
dc.relation.urlhttp://www.sciencedirect.com/science/article/pii/S0167931717300047
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Microelectronic Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Microelectronic Engineering, 13 January 2017. DOI: 10.1016/j.mee.2017.01.004
dc.subjectThermo-plasmonics
dc.subjectElectroless deposition
dc.subjectSilver nanoparticles
dc.subjectSurface enhanced thermo lithography
dc.subjectPolyphthalaldehyde (PPA) polymer
dc.titleSurface enhanced thermo lithography
dc.typeArticle
dc.contributor.departmentMaterial Science and Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalMicroelectronic Engineering
dc.eprint.versionPost-print
dc.contributor.institutionDepartment of Experimental and Clinical Medicine, University of Magna Graecia, 88100 Catanzaro, Italy
dc.contributor.institutionPhysics and Astronomy Department, Rice University, Houston, TX, USA
dc.contributor.institutionSwisslitho AG, Technoparkstrasse 1, CH-8005 Zurich, Switzerland
dc.contributor.institutionIpat-lab, INRS-EMT, 1650 Boul Lionel Boulet, Varennes, QC, Canada
dc.contributor.institutionDepartment of Health Sciences, University of Magna Graecia, 88100 Catanzaro, Italy
dc.contributor.institutionDepartment of Electrical Engineering and Information Technology, University Federico II, Naples, Italy
kaust.personDi Fabrizio, Enzo M.
dc.date.published-online2017-01-13
dc.date.published-print2017-04


Files in this item

Thumbnail
Name:
1-s2.0-S0167931717300047-main.pdf
Size:
881.4Kb
Format:
PDF
Description:
Accepted Manuscript
Thumbnail
Name:
mmc1.docx
Size:
337.9Kb
Format:
Microsoft Word 2007
Description:
Supplemental files
Thumbnail
Name:
1-s2.0-S0167931717300047-fx1.jpg
Size:
27.32Kb
Format:
JPEG image
Description:
Graphical abstract

This item appears in the following Collection(s)

Show simple item record