Surface enhanced thermo lithography
dc.contributor.author | Coluccio, Maria Laura | |
dc.contributor.author | Alabastri, Alessandro | |
dc.contributor.author | Bonanni, Simon | |
dc.contributor.author | Majewska, Roksana | |
dc.contributor.author | Dattoli, Elisabetta | |
dc.contributor.author | Barberio, Marianna | |
dc.contributor.author | Candeloro, Patrizio | |
dc.contributor.author | Perozziello, Gerardo | |
dc.contributor.author | Mollace, Vincenzo | |
dc.contributor.author | Di Fabrizio, Enzo M. | |
dc.contributor.author | Gentile, Francesco | |
dc.date.accessioned | 2017-01-15T13:40:36Z | |
dc.date.available | 2017-01-15T13:40:36Z | |
dc.date.issued | 2017-01-13 | |
dc.identifier.citation | Coluccio ML, Alabastri A, Bonanni S, Majewska R, Dattoli E, et al. (2017) Surface enhanced thermo lithography. Microelectronic Engineering. Available: http://dx.doi.org/10.1016/j.mee.2017.01.004. | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.doi | 10.1016/j.mee.2017.01.004 | |
dc.identifier.uri | http://hdl.handle.net/10754/622694 | |
dc.description.abstract | We used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry. | |
dc.description.sponsorship | This work has been partially funded from the Ministry of Health, Italy (Project n. GR-201s0-2320665). | |
dc.publisher | Elsevier BV | |
dc.relation.url | http://www.sciencedirect.com/science/article/pii/S0167931717300047 | |
dc.rights | NOTICE: this is the author’s version of a work that was accepted for publication in Microelectronic Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Microelectronic Engineering, 13 January 2017. DOI: 10.1016/j.mee.2017.01.004 | |
dc.subject | Thermo-plasmonics | |
dc.subject | Electroless deposition | |
dc.subject | Silver nanoparticles | |
dc.subject | Surface enhanced thermo lithography | |
dc.subject | Polyphthalaldehyde (PPA) polymer | |
dc.title | Surface enhanced thermo lithography | |
dc.type | Article | |
dc.contributor.department | Material Science and Engineering Program | |
dc.contributor.department | Physical Science and Engineering (PSE) Division | |
dc.identifier.journal | Microelectronic Engineering | |
dc.eprint.version | Post-print | |
dc.contributor.institution | Department of Experimental and Clinical Medicine, University of Magna Graecia, 88100 Catanzaro, Italy | |
dc.contributor.institution | Physics and Astronomy Department, Rice University, Houston, TX, USA | |
dc.contributor.institution | Swisslitho AG, Technoparkstrasse 1, CH-8005 Zurich, Switzerland | |
dc.contributor.institution | Ipat-lab, INRS-EMT, 1650 Boul Lionel Boulet, Varennes, QC, Canada | |
dc.contributor.institution | Department of Health Sciences, University of Magna Graecia, 88100 Catanzaro, Italy | |
dc.contributor.institution | Department of Electrical Engineering and Information Technology, University Federico II, Naples, Italy | |
kaust.person | Di Fabrizio, Enzo M. | |
refterms.dateFOA | 2019-01-13T00:00:00Z | |
dc.date.published-online | 2017-01-13 | |
dc.date.published-print | 2017-04 |
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