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dc.contributor.authorCarreno, Armando Arpys Arevalo
dc.contributor.authorConchouso Gonzalez, David
dc.contributor.authorCastro, David
dc.contributor.authorKosel, Jürgen
dc.contributor.authorFoulds, Ian G.
dc.date.accessioned2017-01-02T09:55:31Z
dc.date.available2017-01-02T09:55:31Z
dc.date.issued2016-12-19
dc.identifier.citationArevalo A, Conchouso D, Castro D, Kosel J, Foulds IG (2016) Piezoelectric transducer array microspeaker. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758227.
dc.identifier.doi10.1109/NEMS.2016.7758227
dc.identifier.urihttp://hdl.handle.net/10754/622587
dc.description.abstractIn this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/document/7758227/
dc.titlePiezoelectric transducer array microspeaker
dc.typeConference Paper
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Division
dc.identifier.journal2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
dc.contributor.institutionUniversity of British Columbia (UBC). Kelenowa, Canada
kaust.personCarreno, Armando Arpys Arevalo
kaust.personConchouso Gonzalez, David
kaust.personCastro, David
kaust.personKosel, Jürgen
kaust.personFoulds, Ian G.
dc.date.published-online2016-12-19
dc.date.published-print2016-04


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