• Login
    View Item 
    •   Home
    • Research
    • Conference Papers
    • View Item
    •   Home
    • Research
    • Conference Papers
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Browse

    All of KAUSTCommunitiesIssue DateSubmit DateThis CollectionIssue DateSubmit Date

    My Account

    Login

    Quick Links

    Open Access PolicyORCID LibguideTheses and Dissertations LibguideSubmit an Item

    Statistics

    Display statistics

    Piezoelectric transducer array microspeaker

    • CSV
    • RefMan
    • EndNote
    • BibTex
    • RefWorks
    Type
    Conference Paper
    Authors
    Carreno, Armando Arpys Arevalo cc
    Conchouso Gonzalez, David cc
    Castro, David cc
    Kosel, Jürgen cc
    Foulds, Ian G.
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering Program
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Sensing, Magnetism and Microsystems Lab
    Date
    2016-12-19
    Online Publication Date
    2016-12-19
    Print Publication Date
    2016-04
    Permanent link to this record
    http://hdl.handle.net/10754/622587
    
    Metadata
    Show full item record
    Abstract
    In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50
    Citation
    Arevalo A, Conchouso D, Castro D, Kosel J, Foulds IG (2016) Piezoelectric transducer array microspeaker. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758227.
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    Journal
    2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
    DOI
    10.1109/NEMS.2016.7758227
    Additional Links
    http://ieeexplore.ieee.org/document/7758227/
    ae974a485f413a2113503eed53cd6c53
    10.1109/NEMS.2016.7758227
    Scopus Count
    Collections
    Conference Papers; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Mechanical Engineering Program; Sensing, Magnetism and Microsystems Lab; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

    entitlement

     
    DSpace software copyright © 2002-2023  DuraSpace
    Quick Guide | Contact Us | KAUST University Library
    Open Repository is a service hosted by 
    Atmire NV
     

    Export search results

    The export option will allow you to export the current search results of the entered query to a file. Different formats are available for download. To export the items, click on the button corresponding with the preferred download format.

    By default, clicking on the export buttons will result in a download of the allowed maximum amount of items. For anonymous users the allowed maximum amount is 50 search results.

    To select a subset of the search results, click "Selective Export" button and make a selection of the items you want to export. The amount of items that can be exported at once is similarly restricted as the full export.

    After making a selection, click one of the export format buttons. The amount of items that will be exported is indicated in the bubble next to export format.