Type
Conference PaperAuthors
Carreno, Armando Arpys Arevalo
Conchouso Gonzalez, David

Castro, David

Kosel, Jürgen

Foulds, Ian G.
KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Sensing, Magnetism and Microsystems Lab
Date
2016-12-19Online Publication Date
2016-12-19Print Publication Date
2016-04Permanent link to this record
http://hdl.handle.net/10754/622587
Metadata
Show full item recordAbstract
In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50Citation
Arevalo A, Conchouso D, Castro D, Kosel J, Foulds IG (2016) Piezoelectric transducer array microspeaker. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758227.Journal
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)Additional Links
http://ieeexplore.ieee.org/document/7758227/ae974a485f413a2113503eed53cd6c53
10.1109/NEMS.2016.7758227