Piezoelectric transducer array microspeaker

Type
Conference Paper
Authors
Carreno, Armando Arpys Arevalo cc
Conchouso Gonzalez, David cc
Castro, David cc
Kosel, Jürgen cc
Foulds, Ian G.
KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Sensing, Magnetism and Microsystems Lab
Date
2016-12-19
Online Publication Date
2016-12-19
Print Publication Date
2016-04
Permanent link to this record
http://hdl.handle.net/10754/622587

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Abstract
In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50
Citation
Arevalo A, Conchouso D, Castro D, Kosel J, Foulds IG (2016) Piezoelectric transducer array microspeaker. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758227.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Journal
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
DOI
10.1109/NEMS.2016.7758227
Additional Links
http://ieeexplore.ieee.org/document/7758227/
Collections
Conference Papers; Physical Science and Engineering (PSE) Division; Electrical Engineering Program; Mechanical Engineering Program; Sensing, Magnetism and Microsystems Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division