Piezoelectric transducer array microspeaker

Type
Conference Paper
Authors
Carreno, Armando Arpys Arevalo cc
Conchouso Gonzalez, David cc
Castro, David
Kosel, Jürgen cc
Foulds, Ian G.
KAUST Department
Physical Sciences and Engineering (PSE) Division
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Mechanical Engineering Program
Electrical Engineering Program
Date
2016-12-19

Metadata
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Abstract
In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array of micro-machined piezoelectric membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each array contains 2n piezoelectric transducer membranes, where “n” is the bit number. Every element of the array has a circular shape structure. The membrane is made out four layers: 300nm of platinum for the bottom electrode, 250nm or lead zirconate titanate (PZT), a top electrode of 300nm and a structural layer of 50
Citation
Arevalo A, Conchouso D, Castro D, Kosel J, Foulds IG (2016) Piezoelectric transducer array microspeaker. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). Available: http://dx.doi.org/10.1109/NEMS.2016.7758227.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Journal
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
DOI
10.1109/NEMS.2016.7758227
Handle URI
http://hdl.handle.net/10754/622587
Additional Links
http://ieeexplore.ieee.org/document/7758227/
Collections
Conference Papers; Physical Sciences and Engineering (PSE) Division; Electrical Engineering Program; Mechanical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division