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dc.contributor.authorHafiz, Md Abdullah Al
dc.contributor.authorKosuru, Lakshmoji
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2017-01-02T09:55:29Z
dc.date.available2017-01-02T09:55:29Z
dc.date.issued2016-08-18
dc.identifier.citationAl Hafiz MA, Kosuru L, Younis MI (2016) Electrothermal Frequency Modulated Resonator for Mechanical Memory. Journal of Microelectromechanical Systems 25: 877–883. Available: http://dx.doi.org/10.1109/JMEMS.2016.2598357.
dc.identifier.issn1057-7157
dc.identifier.issn1941-0158
dc.identifier.doi10.1109/JMEMS.2016.2598357
dc.identifier.urihttp://hdl.handle.net/10754/622541
dc.description.abstractIn this paper, we experimentally demonstrate a mechanical memory device based on the nonlinear dynamics of an electrostatically actuated microelectromechanical resonator utilizing an electrothermal frequency modulation scheme. The microstructure is deliberately fabricated as an in-plane shallow arch to achieve geometric quadratic nonlinearity. We exploit this inherent nonlinearity of the arch and drive it at resonance with minimal actuation voltage into the nonlinear regime, thereby creating softening behavior, hysteresis, and coexistence of states. The hysteretic frequency band is controlled by the electrothermal actuation voltage. Binary values are assigned to the two allowed dynamical states on the hysteretic response curve of the arch resonator with respect to the electrothermal actuation voltage. Set-and-reset operations of the memory states are performed by applying controlled dc pulses provided through the electrothermal actuation scheme, while the read-out operation is performed simultaneously by measuring the motional current through a capacitive detection technique. This novel memory device has the advantages of operating at low voltages and under room temperature. [2016-0043]
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/document/7547384/
dc.subjectArch shaped microbeam
dc.subjectElectrothermal frequency modulation
dc.subjectmechanical memory
dc.titleElectrothermal Frequency Modulated Resonator for Mechanical Memory
dc.typeArticle
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Division
dc.identifier.journalJournal of Microelectromechanical Systems
kaust.personHafiz, Md Abdullah Al
kaust.personKosuru, Lakshmoji
kaust.personYounis, Mohammad I.


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