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    Electrothermal Frequency Modulated Resonator for Mechanical Memory

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    Type
    Article
    Authors
    Hafiz, Md Abdullah Al cc
    Kosuru, Lakshmoji cc
    Younis, Mohammad I. cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2016-08-18
    Online Publication Date
    2016-08-18
    Print Publication Date
    2016-10
    Permanent link to this record
    http://hdl.handle.net/10754/622541
    
    Metadata
    Show full item record
    Abstract
    In this paper, we experimentally demonstrate a mechanical memory device based on the nonlinear dynamics of an electrostatically actuated microelectromechanical resonator utilizing an electrothermal frequency modulation scheme. The microstructure is deliberately fabricated as an in-plane shallow arch to achieve geometric quadratic nonlinearity. We exploit this inherent nonlinearity of the arch and drive it at resonance with minimal actuation voltage into the nonlinear regime, thereby creating softening behavior, hysteresis, and coexistence of states. The hysteretic frequency band is controlled by the electrothermal actuation voltage. Binary values are assigned to the two allowed dynamical states on the hysteretic response curve of the arch resonator with respect to the electrothermal actuation voltage. Set-and-reset operations of the memory states are performed by applying controlled dc pulses provided through the electrothermal actuation scheme, while the read-out operation is performed simultaneously by measuring the motional current through a capacitive detection technique. This novel memory device has the advantages of operating at low voltages and under room temperature. [2016-0043]
    Citation
    Al Hafiz MA, Kosuru L, Younis MI (2016) Electrothermal Frequency Modulated Resonator for Mechanical Memory. Journal of Microelectromechanical Systems 25: 877–883. Available: http://dx.doi.org/10.1109/JMEMS.2016.2598357.
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    Journal
    Journal of Microelectromechanical Systems
    DOI
    10.1109/JMEMS.2016.2598357
    Additional Links
    http://ieeexplore.ieee.org/document/7547384/
    ae974a485f413a2113503eed53cd6c53
    10.1109/JMEMS.2016.2598357
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

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