Design and fabrication of capacitive interdigitated electrodes for smart gas sensors
Type
Conference PaperAuthors
Omran, Hesham
Salama, Khaled N.

KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Sensors Lab
Date
2016-09-05Online Publication Date
2016-09-05Print Publication Date
2015-11Permanent link to this record
http://hdl.handle.net/10754/622531
Metadata
Show full item recordAbstract
In this paper, we study the design parameters of capacitive interdigitated electrodes (IDEs) and the effect of these parameters on the sensitivity of the IDEs when employed as a capacitive gas sensor. Finite element simulations using COMSOL Multiphysics were carried out to evaluate the sensitivity of the capacitive sensor. Simulations show that for permittivity-based sensing, the optimum thickness of the sensing film is slightly more than half the wavelength of the IDEs structure. On the other hand, sensing films that are thinner than half wavelength should be used if the required sensing mechanism is based on structural swelling. Increasing the IDEs metal thickness can increase the sensitivity by increasing the sidewall electric field, but this is only true if the sensing film is thick enough to completely fill the spacing between the electrodes. A simple and reliable IDEs structure and fabrication process are proposed. Physical dry etching provides good yield and fine resolution compared to liftoff technique. Fabricated and packaged prototype sensors are presented. © 2015 IEEE.Citation
Omran H, Salama KN (2015) Design and fabrication of capacitive interdigitated electrodes for smart gas sensors. 2015 IEEE 3rd International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA). Available: http://dx.doi.org/10.1109/ICSIMA.2015.7559021.Conference/Event name
3rd IEEE International Conference on Smart Instrumentation, Measurement and Applications, ICSIMA 2015Additional Links
http://ieeexplore.ieee.org/document/7559021/ae974a485f413a2113503eed53cd6c53
10.1109/ICSIMA.2015.7559021