Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications
AuthorsCarreno, Armando Arpys Arevalo
Conchouso Gonzalez, David
Foulds, Ian G.
KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Physical Sciences and Engineering (PSE) Division
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AbstractThe integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.
CitationArevalo A, Castro D, Diaz M, Conchouso D, Foulds IG (2015) Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications. Micro & Nano Letters 10: 545–549. Available: http://dx.doi.org/10.1049/mnl.2015.0198.
SponsorsThis work was supported by the King Abdullah University of Science and Technology.
JournalMicro & Nano Letters