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dc.contributor.authorBouchaala, Adam M.
dc.contributor.authorNayfeh, Ali H.
dc.contributor.authorJaber, Nizar
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2017-01-02T09:28:30Z
dc.date.available2017-01-02T09:28:30Z
dc.date.issued2016-08-31
dc.identifier.citationBouchaala A, Nayfeh AH, Jaber N, Younis MI (2016) Mass and position determination in MEMS mass sensors: a theoretical and an experimental investigation. Journal of Micromechanics and Microengineering 26: 105009. Available: http://dx.doi.org/10.1088/0960-1317/26/10/105009.
dc.identifier.issn0960-1317
dc.identifier.issn1361-6439
dc.identifier.doi10.1088/0960-1317/26/10/105009
dc.identifier.urihttp://hdl.handle.net/10754/622426
dc.description.abstractWe present a method to determine accurately the position and mass of an entity attached to the surface of an electrostatically actuated clamped-clamped microbeam implemented as a mass sensor. In the theoretical investigation, the microbeam is modeled as a nonlinear Euler-Bernoulli beam and a perturbation technique is used to develop a closed-form expression for the frequency shift due to an added mass at a specific location on the microbeam surface. The experimental investigation was conducted on a microbeam made of Polyimide with a special lower electrode to excite both of the first and second modes of vibration. Using an ink-jet printer, we deposited droplets of polymers with a defined mass and position on the surface of the microbeam and we measured the shifts in its resonance frequencies. The theoretical predictions of the mass and position of the deposited droplets match well with the experimental measurements.
dc.description.sponsorshipThis research has been supported by KAUST.
dc.publisherIOP Publishing
dc.subjectelectrostatic actuation
dc.subjecthigher-order modes
dc.subjectmass and position determination
dc.subjectmicrobeams
dc.titleMass and position determination in MEMS mass sensors: a theoretical and an experimental investigation
dc.typeArticle
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalJournal of Micromechanics and Microengineering
dc.contributor.institutionDepartment of Engineering Science and Mechanics, MC 0219, Virginia Polytechnic Institute and State University, Blacksburg, VA, 24061, United States
dc.contributor.institutionDepartment of Mechanical Engineering, University of Jordan, Amman, Jordan
kaust.personBouchaala, Adam M.
kaust.personJaber, Nizar
kaust.personYounis, Mohammad I.
dc.date.published-online2016-08-31
dc.date.published-print2016-10-01


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