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dc.contributor.authorSaghir, Shahid
dc.contributor.authorBellaredj, Mohammed Lamine Faycal
dc.contributor.authorRamini, Abdallah
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2017-01-02T09:28:30Z
dc.date.available2017-01-02T09:28:30Z
dc.date.issued2016-07-01
dc.identifier.citationSaghir S, Bellaredj ML, Ramini A, Younis MI (2016) Initially curved microplates under electrostatic actuation: theory and experiment. Journal of Micromechanics and Microengineering 26: 095004. Available: http://dx.doi.org/10.1088/0960-1317/26/9/095004.
dc.identifier.issn0960-1317
dc.identifier.issn1361-6439
dc.identifier.doi10.1088/0960-1317/26/9/095004
dc.identifier.urihttp://hdl.handle.net/10754/622419
dc.description.abstractMicroplates are the building blocks of many micro-electro-mechanical systems. It is common for them to experience initial curvature imperfection due to residual stresses caused by the micro fabrication process. Such plates are essentially different from perfectly flat ones and cannot be modeled using flat plate models. In this paper, we adopt a dynamic analog of the von Karman governing equations of imperfect plates. These equations are then used to develop a reduced order model based on the Galerkin procedure, to simulate the static and dynamic behavior of the microplate under electrostatic actuation. To validate the simulation results, an initially curved imperfect microplate made of silicon nitride is fabricated and tested. The static behaviour of the microplate is investigated when applying a DC voltage Vdc. Then, the dynamic behaviour of the microplate is examined under the application of a harmonic AC voltage, Vac, superimposed to Vdc. The simulation results show good agreement with the experimentally measured responses. © 2016 IOP Publishing Ltd.
dc.publisherIOP Publishing
dc.relation.urlhttp://iopscience.iop.org/article/10.1088/0960-1317/26/9/095004/meta;jsessionid=8BA3DFEB8A9930B84D773F2457EAB882.ip-10-40-1-114
dc.subjectelectrostatic actuation
dc.subjectimperfect plates
dc.subjectnonlinear oscillation
dc.subjectreduced order model
dc.subjectvibration of plates
dc.titleInitially curved microplates under electrostatic actuation: theory and experiment
dc.typeArticle
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalJournal of Micromechanics and Microengineering
kaust.personSaghir, Shahid
kaust.personBellaredj, Mohammed Lamine Faycal
kaust.personRamini, Abdallah
kaust.personYounis, Mohammad I.
dc.date.published-online2016-07-01
dc.date.published-print2016-09-01


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