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dc.contributor.advisorFoulds, Ian G.*
dc.contributor.advisorKosel, Jürgen*
dc.contributor.authorCarreno, Armando Arpys Arevalo*
dc.date.accessioned2016-12-05T12:55:43Z
dc.date.available2016-12-05T12:55:43Z
dc.date.issued2016-11
dc.identifier.doi10.25781/KAUST-Q5E4H
dc.identifier.urihttp://hdl.handle.net/10754/621944
dc.description.abstractThe development of a polyimide and metals multi-user surface micro-machining process for Micro-electro-mechanical Systems (MEMS) is presented. The process was designed to be as general as possible, and designed to be capable to fabricate different designs on a single silicon wafer. The process was not optimized with the purpose of fabricating any one specific device but can be tweaked to satisfy individual needs depending on the application. The fabrication process uses Polyimide as the structural material and three separated metallization layers that can be interconnected depending on the desired application. The technology allows the development of out-of-plane compliant mechanisms, which can be combined with six variations of different physical principles for actuation and sensing on a single processed silicon wafer. These variations are: electrostatic motion, thermal bimorph actuation, capacitive sensing, magnetic sensing, thermocouple-based sensing and radio frequency transmission and reception.en
dc.language.isoenen
dc.subjectMEMSen
dc.subjectMicrofabricationen
dc.subjectPolyimideen
dc.subjectPZTen
dc.subjectMulti-user processesen
dc.subjectMicro-loudspeakeren
dc.titlePolyimide and Metals MEMS Multi-User Processesen
dc.typeDissertationen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division*
thesis.degree.grantorKing Abdullah University of Science and Technologyen_GB
dc.contributor.committeememberYounis, Mohammad I.*
dc.contributor.committeememberBohringer, Karl*
thesis.degree.disciplineElectrical Engineeringen
thesis.degree.nameDoctor of Philosophyen
refterms.dateFOA2017-12-06T00:00:00Z


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