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dc.contributor.authorHafiz, Md Abdullah Al
dc.contributor.authorKosuru, Lakshmoji
dc.contributor.authorRamini, Abdallah
dc.contributor.authorNanaiah, Karumbaiah Chappanda
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2016-11-23T13:48:38Z
dc.date.available2016-11-23T13:48:38Z
dc.date.issued2016-10-18
dc.identifier.citationHafiz M, Kosuru L, Ramini A, Chappanda K, Younis M (2016) In-Plane MEMS Shallow Arch Beam for Mechanical Memory. Micromachines 7: 191. Available: http://dx.doi.org/10.3390/mi7100191.
dc.identifier.issn2072-666X
dc.identifier.doi10.3390/mi7100191
dc.identifier.urihttp://hdl.handle.net/10754/621870
dc.description.abstractWe demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC) bias voltage, thereby proving the memory concept.
dc.description.sponsorshipThe authors acknowledge Ulrich Buttner, Electromechanical Microsystem & Polymer Integration Research (EMPIRe) Lab at King Abdullah University of Science and Technology (KAUST) for helping with laser cutting the chips. This research has been funded by KAUST.
dc.publisherMDPI AG
dc.relation.urlhttp://www.mdpi.com/2072-666X/7/10/191/htm
dc.rightsThis article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/
dc.subjectin-plane MEMS
dc.subjectshallow arch
dc.subjectbistability
dc.subjectmechanical memory
dc.titleIn-Plane MEMS Shallow Arch Beam for Mechanical Memory
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalMicromachines
dc.eprint.versionPublisher's Version/PDF
kaust.personHafiz, Md Abdullah Al
kaust.personKosuru, Lakshmoji
kaust.personRamini, Abdallah
kaust.personNanaiah, Karumbaiah Chappanda
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-06-14T03:17:23Z


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This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
Except where otherwise noted, this item's license is described as This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).