Three-terminal nanoelectromechanical switch based on tungsten nitride—an amorphous metallic material
Type
ArticleKAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Integrated Nanotechnology Lab
KAUST Grant Number
GRP-CF-2011-08-SCRG-1-2012-HUS-008
Date
2015-12-04Online Publication Date
2015-12-04Print Publication Date
2016-01-22Permanent link to this record
http://hdl.handle.net/10754/621518
Metadata
Show full item recordAbstract
© 2016 IOP Publishing Ltd. Nanoelectromechanical (NEM) switches inherently have zero off-state leakage current and nearly ideal sub-threshold swing due to their mechanical nature of operation, in contrast to semiconductor switches. A challenge for NEM switches to be practical for low-power digital logic application is their relatively large operation voltage which can result in higher dynamic power consumption. Herein we report a three-terminal laterally actuated NEM switch fabricated with an amorphous metallic material: tungsten nitride (WNx). As-deposited WNx thin films have high Young's modulus (300 GPa) and reasonably high hardness (3 GPa), which are advantageous for high wear resistance. The first prototype WNx switches are demonstrated to operate with relatively low control voltage, down to 0.8 V for an air gap thickness of 150 nm.Citation
Mayet AM, Hussain AM, Hussain MM (2015) Three-terminal nanoelectromechanical switch based on tungsten nitride—an amorphous metallic material. Nanotechnology 27: 035202. Available: http://dx.doi.org/10.1088/0957-4484/27/3/035202.Sponsors
We are very grateful to Professor Tsu-Jae King Liu of the University of California at Berkeley for the valuable feedbacks regarding this manuscript. AM was partially supported by KAUST OCRF Award No. GRP-CF-2011-08-S and AMH is supported under KAUST OCRF CRG-1-2012-HUS-008. MMH directed the work. AM worked on fabrication and measured data. AMH worked on the analysis. All authors have given approval to the final version of the manuscript.Publisher
IOP PublishingJournal
Nanotechnologyae974a485f413a2113503eed53cd6c53
10.1088/0957-4484/27/3/035202