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    Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation

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    Type
    Article
    Authors
    Jaber, Nizar cc
    Ramini, Abdallah
    Carreno, Armando Arpys Arevalo cc
    Younis, Mohammad I. cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Electrical Engineering Program
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2016-01-06
    Online Publication Date
    2016-01-06
    Print Publication Date
    2016-02-01
    Permanent link to this record
    http://hdl.handle.net/10754/621399
    
    Metadata
    Show full item record
    Abstract
    © 2016 IOP Publishing Ltd. In this study, we demonstrate analytically and experimentally the excitations of the higher order modes of vibrations in electrostatically actuated clamped-clamped microbeam resonators. The concept is based on using partial electrodes with shapes that induce strong excitation of the mode of interest. The devices are fabricated using polyimide as a structural layer coated with nickel from the top and chrome and gold layers from the bottom. Experimentally, frequency sweeps with different electro-dynamical loading conditions are shown to demonstrate the excitation of the higher order modes of vibration. Using a half electrode, the second mode is excited with high amplitude of vibration compared with almost zero response using the full electrode. Also, using a two-third electrode configuration is shown to amplify the third mode resonance amplitude compared with the full electrode under the same electrical loading conditions. An analytical model is developed based on the Euler-Bernollui beam model and the Galerkin method to simulate the device response. Good agreement between the simulation results and the experimental data is reported.
    Citation
    Jaber N, Ramini A, Carreno AAA, Younis MI (2016) Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation. Journal of Micromechanics and Microengineering 26: 025008. Available: http://dx.doi.org/10.1088/0960-1317/26/2/025008.
    Sponsors
    This research was supported by KAUST.
    Publisher
    IOP Publishing
    Journal
    Journal of Micromechanics and Microengineering
    DOI
    10.1088/0960-1317/26/2/025008
    ae974a485f413a2113503eed53cd6c53
    10.1088/0960-1317/26/2/025008
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Electrical and Computer Engineering Program; Mechanical Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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