Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation
Type
ArticleKAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionElectrical Engineering Program
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Date
2016-01-06Online Publication Date
2016-01-06Print Publication Date
2016-02-01Permanent link to this record
http://hdl.handle.net/10754/621399
Metadata
Show full item recordAbstract
© 2016 IOP Publishing Ltd. In this study, we demonstrate analytically and experimentally the excitations of the higher order modes of vibrations in electrostatically actuated clamped-clamped microbeam resonators. The concept is based on using partial electrodes with shapes that induce strong excitation of the mode of interest. The devices are fabricated using polyimide as a structural layer coated with nickel from the top and chrome and gold layers from the bottom. Experimentally, frequency sweeps with different electro-dynamical loading conditions are shown to demonstrate the excitation of the higher order modes of vibration. Using a half electrode, the second mode is excited with high amplitude of vibration compared with almost zero response using the full electrode. Also, using a two-third electrode configuration is shown to amplify the third mode resonance amplitude compared with the full electrode under the same electrical loading conditions. An analytical model is developed based on the Euler-Bernollui beam model and the Galerkin method to simulate the device response. Good agreement between the simulation results and the experimental data is reported.Citation
Jaber N, Ramini A, Carreno AAA, Younis MI (2016) Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation. Journal of Micromechanics and Microengineering 26: 025008. Available: http://dx.doi.org/10.1088/0960-1317/26/2/025008.Sponsors
This research was supported by KAUST.Publisher
IOP Publishingae974a485f413a2113503eed53cd6c53
10.1088/0960-1317/26/2/025008