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dc.contributor.authorCarreno, Armando Arpys Arevalo
dc.contributor.authorCastro, David
dc.contributor.authorConchouso Gonzalez, David
dc.contributor.authorKosel, Jürgen
dc.contributor.authorFoulds, Ian G.
dc.date.accessioned2016-11-03T06:57:40Z
dc.date.available2016-11-03T06:57:40Z
dc.date.issued2016-03-23
dc.identifier.citationArevalo A, Castro D, Conchouso D, Kosel J, Foulds IG (2016) MEMS digital parametric loudspeaker. 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Available: http://dx.doi.org/10.1109/MEMSYS.2016.7421826.
dc.identifier.doi10.1109/MEMSYS.2016.7421826
dc.identifier.urihttp://hdl.handle.net/10754/621323
dc.description.abstractThis paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/document/7421826
dc.titleMEMS digital parametric loudspeaker
dc.typeConference Paper
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.identifier.journal2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
dc.conference.date24 January 2016 through 28 January 2016
dc.conference.name29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
dc.contributor.institutionUniversity of British Columbia, School of Engineering, Okanagan Campus, Kelowna, Canada
kaust.personCarreno, Armando Arpys Arevalo
kaust.personCastro, David
kaust.personConchouso Gonzalez, David
kaust.personKosel, Jürgen
kaust.personFoulds, Ian G.
dc.date.published-online2016-03-23
dc.date.published-print2016-01


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