AuthorsCarreno, Armando Arpys Arevalo
Conchouso Gonzalez, David
Foulds, Ian G.
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AbstractThis paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.
CitationArevalo A, Castro D, Conchouso D, Kosel J, Foulds IG (2016) MEMS digital parametric loudspeaker. 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Available: http://dx.doi.org/10.1109/MEMSYS.2016.7421826.
Conference/Event name29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016