MEMS digital parametric loudspeaker

Type
Conference Paper
Authors
Carreno, Armando Arpys Arevalo cc
Castro, David cc
Conchouso Gonzalez, David cc
Kosel, Jürgen cc
Foulds, Ian G.
KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Date
2016-03-23
Online Publication Date
2016-03-23
Print Publication Date
2016-01
Permanent link to this record
http://hdl.handle.net/10754/621323

Metadata
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Abstract
This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.
Citation
Arevalo A, Castro D, Conchouso D, Kosel J, Foulds IG (2016) MEMS digital parametric loudspeaker. 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Available: http://dx.doi.org/10.1109/MEMSYS.2016.7421826.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Journal
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Conference/Event name
29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
DOI
10.1109/MEMSYS.2016.7421826
Additional Links
http://ieeexplore.ieee.org/document/7421826
Collections
Conference Papers; Electrical and Computer Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division