AuthorsCarreno, Armando Arpys Arevalo
Conchouso Gonzalez, David
Foulds, Ian G.
KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Electrical Engineering Program
Online Publication Date2016-03-23
Print Publication Date2016-01
Permanent link to this recordhttp://hdl.handle.net/10754/621323
MetadataShow full item record
AbstractThis paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction and Parametric Directional Loudspeakers. Two distinct versions of the device were fabricated: one using the electrostatic principle actuation and the other one, the piezoelectric principle. Both versions used similar membrane dimensions, with a diameter of 500 μm. These devices are the smallest Micro-Machined Ultrasound Transducer (MUT) arrays that can be operated for both modes: Digital Sound Reconstruction and Parametric Loudspeaker. The chips consist of an array with 256 transducers, in a footprint of 12 mm by 12 mm. The total single chip size is: 2.3 cm by 2.3 cm, including the contact pads. © 2016 IEEE.
CitationArevalo A, Castro D, Conchouso D, Kosel J, Foulds IG (2016) MEMS digital parametric loudspeaker. 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Available: http://dx.doi.org/10.1109/MEMSYS.2016.7421826.
Conference/Event name29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016