An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation
Type
Conference PaperAuthors
Ramini, AbdallahHafiz, Md Abdullah Al

Bellaredj, Mohammed Lamine Faycal

Al Hennawi, Qais M.

Younis, Mohammad I.

KAUST Department
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) DivisionMechanical Engineering Program
Physical Science and Engineering (PSE) Division
Date
2016-01-20Online Publication Date
2016-01-20Print Publication Date
2015-08-02Permanent link to this record
http://hdl.handle.net/10754/621239
Metadata
Show full item recordAbstract
We present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications. © Copyright 2015 by ASME.Citation
Ramini A, Hafiz A, Bellaredj MLF, Al Hennawi QM, Younis MI (2015) An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation. Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2015-47070.Publisher
ASME InternationalConference/Event name
ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015ae974a485f413a2113503eed53cd6c53
10.1115/DETC2015-47070