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    An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation

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    Type
    Conference Paper
    Authors
    Ramini, Abdallah
    Hafiz, Md Abdullah Al cc
    Bellaredj, Mohammed Lamine Faycal cc
    Al Hennawi, Qais M. cc
    Younis, Mohammad I. cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2016-01-20
    Online Publication Date
    2016-01-20
    Print Publication Date
    2015-08-02
    Permanent link to this record
    http://hdl.handle.net/10754/621239
    
    Metadata
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    Abstract
    We present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications. © Copyright 2015 by ASME.
    Citation
    Ramini A, Hafiz A, Bellaredj MLF, Al Hennawi QM, Younis MI (2015) An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation. Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2015-47070.
    Publisher
    ASME International
    Journal
    Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems
    Conference/Event name
    ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015
    DOI
    10.1115/DETC2015-47070
    ae974a485f413a2113503eed53cd6c53
    10.1115/DETC2015-47070
    Scopus Count
    Collections
    Conference Papers; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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