An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation
Hafiz, Md Abdullah Al
Bellaredj, Mohammed Lamine Faycal
Al Hennawi, Qais M.
Younis, Mohammad I.
KAUST DepartmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Online Publication Date2016-01-20
Print Publication Date2015-08-02
Permanent link to this recordhttp://hdl.handle.net/10754/621239
MetadataShow full item record
AbstractWe present experimental investigation of the nonlinear dynamics of a clamped-clamped in-plane MEMS shallow arch when excited by an electrostatic force. We explore the dynamic behaviors of the in-plane motion of the shallow arches via frequency sweeps in the neighborhood of the first resonance frequency. The shallow arch response is video microscopy recorded and analyzed by means of digital imaging. The experimental data show local softening behavior for small DC and AC loads. For high voltages, the experimental investigation reveals interesting dynamics, where the arch exhibits a dynamic snap-Through behavior. These attractive experimental results verify the previously reported complex behavior of in-plane MEMS arches and show promising results to implement these structures for variety of sensing and actuation applications. © Copyright 2015 by ASME.
CitationRamini A, Hafiz A, Bellaredj MLF, Al Hennawi QM, Younis MI (2015) An Experimental Investigation of the Dynamic Behavior of an In-Plane MEMS Shallow Arch Under Electrostatic Excitation. Volume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. Available: http://dx.doi.org/10.1115/DETC2015-47070.
JournalVolume 4: 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems
Conference/Event nameASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015