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    Planar microlens with front-face angle: design, fabrication, and characterization

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    JM3_15_3_035501.pdf
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    Type
    Article
    Authors
    Hafiz, Md Abdullah Al cc
    Michael, Aron
    Kwok, Chee-Yee
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Mechanical Engineering Program
    Date
    2016-07-08
    Permanent link to this record
    http://hdl.handle.net/10754/618073
    
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    Abstract
    This paper studies the effect of microlens front-face angle on the performance of an optical system consisting of a planar-graded refractive index (GRIN) lens pair facing each other separated by a free-space region. The planar silica microlens pairs are designed to facilitate low-loss optical signal propagation in the free-space region between the opposing optical waveguides. The planar lens is fabricated from a 38-μm-thick fluorine-doped silica layer on a silicon substrate. It has a parabolic refractive index profile in the vertical direction, which is achieved by controlled fluorine incorporation in the silica film to collimate the optical beam in the vertical direction. Horizontal beam collimation is achieved by incorporating a horizontal curvature at the front face of the lens defined by deep oxide etch. A generalized 3×3ABCDGH transformation matrix method has been derived to compute the coupling efficiency of such microlens pairs to take front-face angles that may be present due to fabrication variations or limitations and possible input/output optical fiber offset/tilt into considerations. Pairs of such planar GRIN lens with various free-space propagation distances between them ranging from 75 to 2500 μm and with front-face angles of 1.5 deg, 2 deg, and 4 deg have been fabricated and characterized. Beam propagation method simulations have been carried out to substantiate the theoretical and experimental results. The results indicate that the optical loss is reasonably low up to 1.5 deg of front-face angles and increases significantly with further increase in the front-face angle. Analysis shows that for a given system with specific microlens front-face angle, the optical loss can be significantly reduced by properly compensating the vertical position of the input and output fibers.
    Citation
    Planar microlens with front-face angle: design, fabrication, and characterization 2016, 15 (3):035501 Journal of Micro/Nanolithography, MEMS, and MOEMS
    Sponsors
    Authors would like to acknowledge the New South Wales Node of the Australian National Fabrication, where the work was performed.
    Publisher
    SPIE-Intl Soc Optical Eng
    Journal
    Journal of Micro/Nanolithography, MEMS, and MOEMS
    DOI
    10.1117/1.JMM.15.3.035501
    Additional Links
    http://nanolithography.spiedigitallibrary.org/article.aspx?doi=10.1117/1.JMM.15.3.035501
    ae974a485f413a2113503eed53cd6c53
    10.1117/1.JMM.15.3.035501
    Scopus Count
    Collections
    Articles; Mechanical Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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