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    A smart microelectromechanical sensor and switch triggered by gas

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    Type
    Article
    Authors
    Bouchaala, Adam M.
    Jaber, Nizar cc
    Shekhah, Osama cc
    Chernikova, Valeriya cc
    Eddaoudi, Mohamed cc
    Younis, Mohammad I. cc
    KAUST Department
    Advanced Membranes and Porous Materials Research Center
    Chemical Science Program
    Functional Materials Design, Discovery and Development (FMD3)
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2016-07-05
    Online Publication Date
    2016-07-05
    Print Publication Date
    2016-07-04
    Permanent link to this record
    http://hdl.handle.net/10754/615923
    
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    Abstract
    There is an increasing interest to realize smarter sensors and actuators that can deliver a multitude of sophisticated functionalities while being compact in size and of low cost. We report here combining both sensing and actuation on the same device based on a single microstructure. Specifically, we demonstrate a smart resonant gas (mass) sensor, which in addition to being capable of quantifying the amount of absorbed gas, can be autonomously triggered as an electrical switch upon exceeding a preset threshold of absorbed gas. Toward this, an electrostatically actuated polymer microbeam is fabricated and is then functionalized with a metal-organic framework, namely, HKUST-1. The microbeam is demonstrated to absorb vapors up to a certain threshold, after which is shown to collapse through the dynamic pull-in instability. Upon pull-in, the microstructure can be made to act as an electrical switch to achieve desirable actions, such as alarming.
    Citation
    A smart microelectromechanical sensor and switch triggered by gas 2016, 109 (1):013502 Applied Physics Letters
    Publisher
    AIP Publishing
    Journal
    Applied Physics Letters
    DOI
    10.1063/1.4955309
    Additional Links
    http://scitation.aip.org/content/aip/journal/apl/109/1/10.1063/1.4955309
    ae974a485f413a2113503eed53cd6c53
    10.1063/1.4955309
    Scopus Count
    Collections
    Articles; Advanced Membranes and Porous Materials Research Center; Physical Science and Engineering (PSE) Division; Functional Materials Design, Discovery and Development (FMD3); Chemical Science Program; Mechanical Engineering Program

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