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dc.contributor.authorIlyas, Saad
dc.contributor.authorNanaiah, Karumbaiah Chappanda
dc.contributor.authorHafiz, Md Abdullah Al
dc.contributor.authorRamini, Abdallah
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2016-06-27T10:33:08Z
dc.date.available2016-06-27T10:33:08Z
dc.date.issued2016-06-27
dc.identifier.citationAn Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams 2016 Sensors and Actuators A: Physical
dc.identifier.issn09244247
dc.identifier.doi10.1016/j.sna.2016.06.021
dc.identifier.urihttp://hdl.handle.net/10754/614801
dc.description.abstractWe present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever beams forming the two sides of a capacitor. The experimental and theoretical analysis of the coupled system is carried out and compared against the results of beams actuated with fixed electrodes individually. The pull-in characteristics of the electrostatically coupled beams are studied, including the pull-in time. The dynamics of the coupled dual beams are explored via frequency sweeps around the neighborhood of the natural frequencies of the system for different input voltages. Good agreement is reported among the simulation results and the experimental data. The results show considerable drop in the pull-in values as compared to single microbeam resonators. The dynamics of the coupled beam resonators are demonstrated as a way to increase the bandwidth of the resonator near primary resonance as well as a way to introduce increased frequency shift, which can be promising for resonant sensing applications. Moreover the dynamic pull-in characteristics are also studied and proposed as a way to sense the shift in resonance frequency.
dc.description.sponsorshipThis work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.
dc.language.isoen
dc.publisherElsevier BV
dc.relation.urlhttp://linkinghub.elsevier.com/retrieve/pii/S0924424716303077
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators A: Physical, 16 June 2016. DOI: 10.1016/j.sna.2016.06.021
dc.subjectMicro cantilevers
dc.subjectStatic pull-in
dc.subjectPull-in time
dc.subjectCoupled resonators
dc.subjectElectrostatic actuation
dc.subjectBandwidth
dc.subjectDynamic pull-in
dc.titleAn Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Division
dc.identifier.journalSensors and Actuators A: Physical
dc.eprint.versionPost-print
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)
kaust.personIlyas, Saad
kaust.personNanaiah, Karumbaiah Chappanda
kaust.personHafiz, Md Abdullah Al
kaust.personRamini, Abdallah
kaust.personYounis, Mohammad I.
dc.date.published-online2016-06-27
dc.date.published-print2016-08


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