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    An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams

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    Type
    Article
    Authors
    Ilyas, Saad cc
    Nanaiah, Karumbaiah Chappanda
    Hafiz, Md Abdullah Al cc
    Ramini, Abdallah
    Younis, Mohammad I. cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2016-06-27
    Online Publication Date
    2016-06-27
    Print Publication Date
    2016-08
    Permanent link to this record
    http://hdl.handle.net/10754/614801
    
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    Abstract
    We present an experimental and theoretical investigation of the static and dynamic behavior of electrostatically coupled laterally actuated silicon microbeams. The coupled beam resonators are composed of two almost identical flexible cantilever beams forming the two sides of a capacitor. The experimental and theoretical analysis of the coupled system is carried out and compared against the results of beams actuated with fixed electrodes individually. The pull-in characteristics of the electrostatically coupled beams are studied, including the pull-in time. The dynamics of the coupled dual beams are explored via frequency sweeps around the neighborhood of the natural frequencies of the system for different input voltages. Good agreement is reported among the simulation results and the experimental data. The results show considerable drop in the pull-in values as compared to single microbeam resonators. The dynamics of the coupled beam resonators are demonstrated as a way to increase the bandwidth of the resonator near primary resonance as well as a way to introduce increased frequency shift, which can be promising for resonant sensing applications. Moreover the dynamic pull-in characteristics are also studied and proposed as a way to sense the shift in resonance frequency.
    Citation
    An Experimental and Theoretical Investigation of Electrostatically Coupled Cantilever Microbeams 2016 Sensors and Actuators A: Physical
    Sponsors
    This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.
    Publisher
    Elsevier BV
    Journal
    Sensors and Actuators A: Physical
    DOI
    10.1016/j.sna.2016.06.021
    Additional Links
    http://linkinghub.elsevier.com/retrieve/pii/S0924424716303077
    ae974a485f413a2113503eed53cd6c53
    10.1016/j.sna.2016.06.021
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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