Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection
Type
ArticleAuthors
Bouchaala, Adam M.Jaber, Nizar

Yassine, Omar

Shekhah, Osama

Chernikova, Valeriya

Eddaoudi, Mohamed

Younis, Mohammad I.

KAUST Department
Advanced Membranes and Porous Materials Research CenterChemical Science Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Functional Materials Design, Discovery and Development (FMD3)
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Date
2016-05-25Permanent link to this record
http://hdl.handle.net/10754/611783
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The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.Citation
Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection 2016, 16 (6):758 SensorsSponsors
This research has been supported by KAUST.Publisher
MDPI AGJournal
SensorsPubMed ID
27231914Additional Links
http://www.mdpi.com/1424-8220/16/6/758ae974a485f413a2113503eed53cd6c53
10.3390/s16060758
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Articles; Advanced Membranes and Porous Materials Research Center; Physical Science and Engineering (PSE) Division; Functional Materials Design, Discovery and Development (FMD3); Chemical Science Program; Mechanical Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) DivisionRelated articles
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