Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection
AuthorsBouchaala, Adam M.
Younis, Mohammad I.
KAUST DepartmentAdvanced Membranes and Porous Materials Research Center
Chemical Science Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Functional Materials Design, Discovery and Development (FMD3)
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Permanent link to this recordhttp://hdl.handle.net/10754/611783
MetadataShow full item record
AbstractThe objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
CitationNonlinear-Based MEMS Sensors and Active Switches for Gas Detection 2016, 16 (6):758 Sensors
SponsorsThis research has been supported by KAUST.
CollectionsArticles; Advanced Membranes and Porous Materials Research Center; Physical Science and Engineering (PSE) Division; Functional Materials Design, Discovery and Development (FMD3); Chemical Science Program; Mechanical Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division
- Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped-Clamped Microbeams for Mass Sensing.
- Authors: Li L, Zhang YP, Ma CC, Liu CC, Peng B
- Issue date: 2019 Dec 19
- Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal⁻Transversal Vibration.
- Authors: Ma C, Cao L, Li L, Shao M, Jing D, Guo Z
- Issue date: 2019 May 10
- Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications.
- Authors: Alneamy AM, Ouakad HM
- Issue date: 2022 Jun 24
- Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error.
- Authors: Feng J, Liu C, Zhang W, Hao S
- Issue date: 2018 Jan 17
- Insights on Capacitive Interdigitated Electrodes Coated with MOF Thin Films: Humidity and VOCs Sensing as a Case Study.
- Authors: Sapsanis C, Omran H, Chernikova V, Shekhah O, Belmabkhout Y, Buttner U, Eddaoudi M, Salama KN
- Issue date: 2015 Jul 24