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    Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection

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    sensors-16-00758.pdf
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    Type
    Article
    Authors
    Bouchaala, Adam M.
    Jaber, Nizar cc
    Yassine, Omar cc
    Shekhah, Osama cc
    Chernikova, Valeriya cc
    Eddaoudi, Mohamed cc
    Younis, Mohammad I. cc
    KAUST Department
    Advanced Membranes and Porous Materials Research Center
    Chemical Science Program
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Functional Materials Design, Discovery and Development (FMD3)
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2016-05-25
    Permanent link to this record
    http://hdl.handle.net/10754/611783
    
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    Abstract
    The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
    Citation
    Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection 2016, 16 (6):758 Sensors
    Sponsors
    This research has been supported by KAUST.
    Publisher
    MDPI AG
    Journal
    Sensors
    DOI
    10.3390/s16060758
    PubMed ID
    27231914
    Additional Links
    http://www.mdpi.com/1424-8220/16/6/758
    ae974a485f413a2113503eed53cd6c53
    10.3390/s16060758
    Scopus Count
    Collections
    Articles; Advanced Membranes and Porous Materials Research Center; Physical Science and Engineering (PSE) Division; Functional Materials Design, Discovery and Development (FMD3); Chemical Science Program; Mechanical Engineering Program; Computer, Electrical and Mathematical Science and Engineering (CEMSE) Division

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