Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection
AuthorsBouchaala, Adam M.
Younis, Mohammad I.
KAUST DepartmentAdvanced Membranes and Porous Materials Research Center
Chemical Science Program
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Functional Materials Design, Discovery and Development (FMD3)
Mechanical Engineering Program
Physical Science and Engineering (PSE) Division
Permanent link to this recordhttp://hdl.handle.net/10754/611783
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AbstractThe objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming.
CitationNonlinear-Based MEMS Sensors and Active Switches for Gas Detection 2016, 16 (6):758 Sensors
SponsorsThis research has been supported by KAUST.
CollectionsArticles; Advanced Membranes and Porous Materials Research Center; Physical Science and Engineering (PSE) Division; Functional Materials Design, Discovery and Development (FMD3); Chemical Science Program; Mechanical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
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