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Fabrication and characterization of magnetic composite membrane pressure sensor

dc.contributor.authorKhan, Mohammed Asadullah
dc.contributor.authorAlfadhel, Ahmed
dc.contributor.authorKosel, Jürgen
dc.contributor.authorBakolka, M.
dc.date.accessioned2016-06-01T12:24:02Z
dc.date.available2016-06-01T12:24:02Z
dc.date.issued2016-05-30
dc.identifier.citationKhan, M. A., Alfadhel, A., Kosel, J., & Bakolka, M. (2016). Fabrication and characterization of magnetic composite membrane pressure sensor. 2016 IEEE Sensors Applications Symposium (SAS). doi:10.1109/sas.2016.7479871
dc.identifier.doi10.1109/SAS.2016.7479871
dc.identifier.urihttp://hdl.handle.net/10754/611377
dc.description.abstractThis paper describes a magnetic field powered pressure sensor, which comprises a coil array and a magnetic composite membrane. The composite membrane is made by embedding a ribbon of the amorphous soft magnetic alloy Vitrovac®, in a 17 mm x 25 mm x 1.5 mm Polydimethylsiloxane (PDMS) layer. PDMS is chosen for its low Young's modulus and the amorphous alloy for its high permeability. The membrane is suspended 1.5 mm above a 17x19 array of microfabricated planar coils. The coils are fabricated by patterning a 620 nm thick gold layer. Each coil occupies an area of 36000 μm2 and consists of 14 turns. The sensor is tested by subjecting it to pressure and simultaneously exciting it by a 24 A/m, 100 kHz magnetic field. A pressure change from 0 kPa to 5.1 kPa, results in a 5400 ppm change in the voltage output.
dc.description.sponsorshipThe authors thank Mohammed Y. Alnassar and Ahad Ali for assisting with the coil array fabrication. Mr. Ulrich Buttner helped with the test setup and characterization of the pressure sensor. Research reported in this publication was supported by the King Abdullah University of Science and Technology (KAUST)
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7479871
dc.rights(c) 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
dc.subjectMagnetic Amorphous Alloy
dc.subjectMagnetic Composite
dc.subjectPressure Sensor
dc.subjectWireless Near Field Sensor
dc.titleFabrication and characterization of magnetic composite membrane pressure sensor
dc.typeConference Paper
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentElectrical Engineering Program
dc.contributor.departmentSensing, Magnetism and Microsystems Lab
dc.identifier.journal2016 IEEE Sensors Applications Symposium (SAS)
dc.conference.date20-22 April 2016
dc.conference.name2016 IEEE Sensors Applications Symposium (SAS)
dc.conference.locationCatania, Italy
dc.eprint.versionPost-print
dc.contributor.institutionElectrical and Computer Engineering Department Effat University Jeddah, Saudi Arabia
kaust.personA. Khan, M.
kaust.personAlfadhel, Ahmed
kaust.personKosel, Jürgen
refterms.dateFOA2018-06-14T08:11:11Z
dc.date.published-online2016-05-30
dc.date.published-print2016-04


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