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dc.contributor.authorHajjaj, Amal
dc.contributor.authorAlcheikh, Nouha
dc.contributor.authorRamini, Abdallah
dc.contributor.authorHafiz, Md Abdullah Al
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2016-04-24T12:59:51Z
dc.date.available2016-04-24T12:59:51Z
dc.date.issued2016-03-30
dc.identifier.citationHighly Tunable Electrothermally and Electrostatically Actuated Resonators 2016:1 Journal of Microelectromechanical Systems
dc.identifier.issn1057-7157
dc.identifier.issn1941-0158
dc.identifier.doi10.1109/JMEMS.2016.2542338
dc.identifier.urihttp://hdl.handle.net/10754/606874
dc.description.abstractThis paper demonstrates experimentally, theoretically, and numerically for the first time, a wide-range tunability of an in-plane clamped-clamped microbeam, bridge, and resonator actuated electrothermally and electrostatically. Using both actuation methods, we demonstrate that a single resonator can be operated at a wide range of frequencies. The microbeam is actuated electrothermally by passing a dc current through it, and electrostatically by applying a dc polarization voltage between the microbeam and the stationary electrode. We show that when increasing the electrothermal voltage, the compressive stress inside the microbeam increases, which leads eventually to its buckling. Before buckling, the fundamental frequency decreases until it drops to very low values, almost to zero. After buckling, the fundamental frequency increases, which is shown to be as high as twice the original resonance frequency. Adding a dc bias changes the qualitative nature of the tunability both before and after buckling, which adds another independent way of tuning. This reduces the dip before buckling, and can eliminate it if desired, and further increases the fundamental frequency after buckling. Analytical results based on the Galerkin discretization of the Euler Bernoulli beam theory are generated and compared with the experimental data and simulation results of a multi-physics finite-element model. A good agreement is found among all the results. [2015-0341]
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7444138
dc.rights(c) 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
dc.subjectTunability
dc.subjectelectrostatic actuation
dc.subjectelectrothermal actuation
dc.subjectresonator
dc.titleHighly Tunable Electrothermally and Electrostatically Actuated Resonators
dc.typeArticle
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Division
dc.identifier.journalJournal of Microelectromechanical Systems
dc.eprint.versionPost-print
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)
kaust.personHajjaj, Amal Z.
kaust.personAlcheikh, Nouha
kaust.personRamini, Abdallah
kaust.personHafiz, Md Abdullah Al
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-06-13T11:44:39Z
dc.date.published-online2016-03-30
dc.date.published-print2016-06


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