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    Highly Tunable Electrothermally and Electrostatically Actuated Resonators

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    Highly Tunable Electrothermally and Electrostatically Actuated Resonators.pdf
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    Type
    Article
    Authors
    Hajjaj, Amal cc
    Alcheikh, Nouha cc
    Ramini, Abdallah
    Hafiz, Md Abdullah Al cc
    Younis, Mohammad I. cc
    KAUST Department
    Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2016-03-30
    Online Publication Date
    2016-03-30
    Print Publication Date
    2016-06
    Permanent link to this record
    http://hdl.handle.net/10754/606874
    
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    Abstract
    This paper demonstrates experimentally, theoretically, and numerically for the first time, a wide-range tunability of an in-plane clamped-clamped microbeam, bridge, and resonator actuated electrothermally and electrostatically. Using both actuation methods, we demonstrate that a single resonator can be operated at a wide range of frequencies. The microbeam is actuated electrothermally by passing a dc current through it, and electrostatically by applying a dc polarization voltage between the microbeam and the stationary electrode. We show that when increasing the electrothermal voltage, the compressive stress inside the microbeam increases, which leads eventually to its buckling. Before buckling, the fundamental frequency decreases until it drops to very low values, almost to zero. After buckling, the fundamental frequency increases, which is shown to be as high as twice the original resonance frequency. Adding a dc bias changes the qualitative nature of the tunability both before and after buckling, which adds another independent way of tuning. This reduces the dip before buckling, and can eliminate it if desired, and further increases the fundamental frequency after buckling. Analytical results based on the Galerkin discretization of the Euler Bernoulli beam theory are generated and compared with the experimental data and simulation results of a multi-physics finite-element model. A good agreement is found among all the results. [2015-0341]
    Citation
    Highly Tunable Electrothermally and Electrostatically Actuated Resonators 2016:1 Journal of Microelectromechanical Systems
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    Journal
    Journal of Microelectromechanical Systems
    DOI
    10.1109/JMEMS.2016.2542338
    Additional Links
    http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7444138
    ae974a485f413a2113503eed53cd6c53
    10.1109/JMEMS.2016.2542338
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

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