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    Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation

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    Type
    Article
    Authors
    Jaber, Nizar cc
    Ramini, Abdallah
    Younis, Mohammad I. cc
    KAUST Department
    Mechanical Engineering Program
    Physical Science and Engineering (PSE) Division
    Date
    2016-03-14
    Online Publication Date
    2016-03-14
    Print Publication Date
    2016-12
    Permanent link to this record
    http://hdl.handle.net/10754/601340
    
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    Abstract
    Using partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped–clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed. New additive and subtractive resonances are demonstrated. We illustrated that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled. The microbeam is fabricated using polyimide as a structural layer coated with nickel from the top and chromium and gold layers from the bottom. Using the Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device. A good agreement between the theoretical and experimental data are reported.
    Citation
    Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation 2016, 2:16002 Microsystems & Nanoengineering
    Sponsors
    We acknowledge financial support from King Abdullah University of Science and Technology.
    Publisher
    Springer Nature
    Journal
    Microsystems & Nanoengineering
    DOI
    10.1038/micronano.2016.2
    Additional Links
    http://www.nature.com/articles/micronano20162
    ae974a485f413a2113503eed53cd6c53
    10.1038/micronano.2016.2
    Scopus Count
    Collections
    Articles; Physical Science and Engineering (PSE) Division; Mechanical Engineering Program

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