Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation
Type
ArticleDate
2016-03-14Online Publication Date
2016-03-14Print Publication Date
2016-12Permanent link to this record
http://hdl.handle.net/10754/601340
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Using partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped–clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed. New additive and subtractive resonances are demonstrated. We illustrated that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled. The microbeam is fabricated using polyimide as a structural layer coated with nickel from the top and chromium and gold layers from the bottom. Using the Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device. A good agreement between the theoretical and experimental data are reported.Citation
Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation 2016, 2:16002 Microsystems & NanoengineeringSponsors
We acknowledge financial support from King Abdullah University of Science and Technology.Publisher
Springer NatureJournal
Microsystems & NanoengineeringAdditional Links
http://www.nature.com/articles/micronano20162ae974a485f413a2113503eed53cd6c53
10.1038/micronano.2016.2