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dc.contributor.authorJaber, Nizar
dc.contributor.authorRamini, Abdallah
dc.contributor.authorAl Hennawi, Qais M.
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2016-03-10T13:13:16Z
dc.date.available2016-03-10T13:13:16Z
dc.date.issued2016-03-09
dc.identifier.citationWideband MEMS Resonator Using Multifrequency Excitation 2016 Sensors and Actuators A: Physical
dc.identifier.issn09244247
dc.identifier.doi10.1016/j.sna.2016.02.030
dc.identifier.urihttp://hdl.handle.net/10754/601137
dc.description.abstractWe demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.
dc.language.isoen
dc.publisherElsevier BV
dc.relation.urlhttp://linkinghub.elsevier.com/retrieve/pii/S0924424716300851
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators A: Physical, 9 March 2016. DOI: 10.1016/j.sna.2016.02.030
dc.subjectnonlinear dynamics
dc.subjectresonator
dc.subjectmixed frequency
dc.subjectwide band
dc.subjectvibration
dc.subjectelectrostatic
dc.titleWideband MEMS Resonator Using Multifrequency Excitation
dc.typeArticle
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalSensors and Actuators A: Physical
dc.eprint.versionPost-print
dc.contributor.institutionDepartment of Mechanical Engineering, State University of New York, Binghamton, NY 13902, USA
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)
kaust.personJaber, Nizar
kaust.personRamini, Abdallah
kaust.personAl Hennawi, Qais M.
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-03-09T00:00:00Z
dc.date.published-online2016-03-09
dc.date.published-print2016-05


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