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dc.contributor.authorLeung, Roger
dc.contributor.authorCheung, Howard
dc.contributor.authorGang, Hong
dc.contributor.authorYe, Wenjing
dc.date.accessioned2016-02-28T07:59:46Z
dc.date.available2016-02-28T07:59:46Z
dc.date.issued2010-03-31
dc.identifier.citationLeung R, Cheung H, Gang H, Ye W (2010) A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators. Microfluid Nanofluid 9: 809–818. Available: http://dx.doi.org/10.1007/s10404-010-0597-0.
dc.identifier.issn1613-4982
dc.identifier.issn1613-4990
dc.identifier.doi10.1007/s10404-010-0597-0
dc.identifier.urihttp://hdl.handle.net/10754/600239
dc.description.abstractSqueeze-film damping on microresonators is a significant damping source even when the surrounding gas is highly rarefied. This article presents a general modeling approach based on Monte Carlo (MC) simulations for the prediction of squeeze-film damping on resonators in the freemolecule regime. The generality of the approach is demonstrated in its capability of simulating resonators of any shape and with any accommodation coefficient. The approach is validated using both the analytical results of the free-space damping and the experimental data of the squeeze-film damping on a clamped-clamped plate resonator oscillating at its first flexure mode. The effect of oscillation modes on the quality factor of the resonator has also been studied and semi-analytical approximate models for the squeeze-film damping with diffuse collisions have been developed.
dc.description.sponsorshipThis publication is based on work supported in part by Award No. SA-C0040/UK-C0016, made by King Abdullah University of Science and Technology (KAUST), and in part by Hong Kong Research Grants Council under Competitive Earmarked Research Grant 621408.
dc.publisherSpringer Nature
dc.subjectFree-molecule regime
dc.subjectMicro-resonator
dc.subjectMonte Carlo simulation
dc.subjectOscillation mode
dc.subjectQuality factor
dc.subjectSqueeze-film damping
dc.titleA Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators
dc.typeArticle
dc.identifier.journalMicrofluidics and Nanofluidics
dc.contributor.institutionDepartment of Mechanical Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
kaust.personYe, Wenjing
kaust.grant.numberSA-C0040
kaust.grant.numberUK-C0016
kaust.grant.fundedcenterKAUST-HKUST Micro/Nanofluidic Joint Laboratory
dc.date.published-online2010-03-31
dc.date.published-print2010-10


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