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    A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators

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    Type
    Article
    Authors
    Leung, Roger
    Cheung, Howard
    Gang, Hong
    Ye, Wenjing
    KAUST Grant Number
    SA-C0040
    UK-C0016
    Date
    2010-03-31
    Online Publication Date
    2010-03-31
    Print Publication Date
    2010-10
    Permanent link to this record
    http://hdl.handle.net/10754/600239
    
    Metadata
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    Abstract
    Squeeze-film damping on microresonators is a significant damping source even when the surrounding gas is highly rarefied. This article presents a general modeling approach based on Monte Carlo (MC) simulations for the prediction of squeeze-film damping on resonators in the freemolecule regime. The generality of the approach is demonstrated in its capability of simulating resonators of any shape and with any accommodation coefficient. The approach is validated using both the analytical results of the free-space damping and the experimental data of the squeeze-film damping on a clamped-clamped plate resonator oscillating at its first flexure mode. The effect of oscillation modes on the quality factor of the resonator has also been studied and semi-analytical approximate models for the squeeze-film damping with diffuse collisions have been developed.
    Citation
    Leung R, Cheung H, Gang H, Ye W (2010) A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators. Microfluid Nanofluid 9: 809–818. Available: http://dx.doi.org/10.1007/s10404-010-0597-0.
    Sponsors
    This publication is based on work supported in part by Award No. SA-C0040/UK-C0016, made by King Abdullah University of Science and Technology (KAUST), and in part by Hong Kong Research Grants Council under Competitive Earmarked Research Grant 621408.
    Publisher
    Springer Nature
    Journal
    Microfluidics and Nanofluidics
    DOI
    10.1007/s10404-010-0597-0
    ae974a485f413a2113503eed53cd6c53
    10.1007/s10404-010-0597-0
    Scopus Count
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