Switch on, switch off: stiction in nanoelectromechanical switches
KAUST Grant NumberKUK-C1-013-04
MetadataShow full item record
AbstractWe present a theoretical investigation of stiction in nanoscale electromechanical contact switches. We develop a mathematical model to describe the deflection of a cantilever beam in response to both electrostatic and van der Waals forces. Particular focus is given to the question of whether adhesive van der Waals forces cause the cantilever to remain in the 'ON' state even when the electrostatic forces are removed. In contrast to previous studies, our theory accounts for deflections with large slopes (i.e. geometrically nonlinear). We solve the resulting equations numerically to study how a cantilever beam adheres to a rigid electrode: transitions between 'free', 'pinned' and 'clamped' states are shown to be discontinuous and to exhibit significant hysteresis. Our findings are compared to previous results from linearized models and the implications for nanoelectromechanical cantilever switch design are discussed. © 2013 IOP Publishing Ltd.
CitationWagner TJW, Vella D (2013) Switch on, switch off: stiction in nanoelectromechanical switches. Nanotechnology 24: 275501. Available: http://dx.doi.org/10.1088/0957-4484/24/27/275501.
SponsorsThis publication is based on work supported in part by Award No. KUK-C1-013-04, made by King Abdullah University of Science and Technology (KAUST). TJWW is supported by EPSRC and Cambridge Philosophical Society.
CollectionsPublications Acknowledging KAUST Support
- Closed-form approximation and numerical validation of the influence of van der Waals force on electrostatic cantilevers at nano-scale separations.
- Authors: Ramezani A, Alasty A, Akbari J
- Issue date: 2008 Jan 9
- Nanoscale characterization of different stiction mechanisms in electrostatically driven MEMS devices based on adhesion and friction measurements.
- Authors: Zaghloul U, Bhushan B, Pons P, Papaioannou GJ, Coccetti F, Plana R
- Issue date: 2011 Jun 1
- A dynamic model of the jump-to phenomenon during AFM analysis.
- Authors: Bowen J, Cheneler D
- Issue date: 2012 Dec 18
- Specific and nonspecific interaction forces between Escherichia coli and silicon nitride, determined by poisson statistical analysis.
- Authors: Abu-Lail NI, Camesano TA
- Issue date: 2006 Aug 15
- Nano-electromechanical Switch Based on a Physical Unclonable Function for Highly Robust and Stable Performance in Harsh Environments.
- Authors: Hwang KM, Park JY, Bae H, Lee SW, Kim CK, Seo M, Im H, Kim DH, Kim SY, Lee GB, Choi YK
- Issue date: 2017 Dec 26