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dc.contributor.authorLi, Li
dc.contributor.authorChakrabarty, Souvik
dc.contributor.authorJiang, Jing
dc.contributor.authorZhang, Ben
dc.contributor.authorOber, Christopher
dc.contributor.authorGiannelis, Emmanuel P.
dc.date.accessioned2016-02-28T06:06:53Z
dc.date.available2016-02-28T06:06:53Z
dc.date.issued2016
dc.identifier.citationLi L, Chakrabarty S, Jiang J, Zhang B, Ober C, et al. (2016) Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups. Nanoscale 8: 1338–1343. Available: http://dx.doi.org/10.1039/c5nr07334k.
dc.identifier.issn2040-3364
dc.identifier.issn2040-3372
dc.identifier.pmid26695121
dc.identifier.doi10.1039/c5nr07334k
dc.identifier.urihttp://hdl.handle.net/10754/599658
dc.description.abstract© 2016 The Royal Society of Chemistry. The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail. The nanoparticles regardless of core or ligand chemistry have a hydrodynamic diameter of 2-3 nm and a very narrow size distribution in organic solvents. The Hansen solubility parameters for nanoparticles functionalized with IBA and 2MBA have the highest contribution from the dispersion interaction than those with tDMA and MAA, which show more polar character. The nanoparticles functionalized with unsaturated surface ligands showed more apparent solubility changes after exposure to DUV than those with saturated ones. The solubility differences after exposure are more pronounced for films containing a higher amount of photoacid generator. The work reported here provides material selection criteria and processing strategies for the design of high performance EUV photoresists.
dc.description.sponsorshipThe authors gratefully acknowledge funding support from SEMATECH and facilities support from Lawrence Berkeley National Laboratory (LBNL), Cornell Nanoscale Science and Technology (CNF), the Cornell Center for Materials Research (CCMR) and the KAUST-Cornell Center of Energy and Sustainability (KAUST-CU).
dc.publisherRoyal Society of Chemistry (RSC)
dc.titleSolubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups
dc.typeArticle
dc.identifier.journalNanoscale
dc.contributor.institutionCornell University, Ithaca, United States
kaust.acknowledged.supportUnitKAUST-Cornell Center of Energy and Sustainability


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