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    Core-shell magnetic nanoparticles for on-chip RF inductors

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    Type
    Conference Paper
    Authors
    Koh, Kisik
    Park, Jeaneun
    Park, Jungwon
    Zhu, Xu
    Lin, Liwei
    Date
    2013-01
    Permanent link to this record
    http://hdl.handle.net/10754/597883
    
    Metadata
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    Abstract
    FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50-150 nm in diameter with 15-20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic resonant frequency of the on-chip inductors based on FeNi3 core-shell nanoparticles has been shown to be over several GHz. A post-CMOS process has been developed to integrate the magnetic nanoparticles to a planar inductor and inductance enhancements up to 50% of the original magnitude with slightly enhanced Q-factor up to 1 GHz have been achieved. © 2013 IEEE.
    Citation
    Koh K, Park J, Park J, Zhu X, Lin L (2013) Core-shell magnetic nanoparticles for on-chip RF inductors. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). Available: http://dx.doi.org/10.1109/MEMSYS.2013.6474279.
    Sponsors
    This work was supported in part by an Academic Excellence Alliance grant awarded by the KAUST (King Abdullah University of Science and Technology) Office of Competitive Research Fund, the DARPA N/MEMS program and a SRC (Semiconductor Research Corporation) grant. The authors would like to thank Dr. Kevin O'Brien, Jun-Chau Chien and Chia Meng Chen for valuable discussions.
    Publisher
    Institute of Electrical and Electronics Engineers (IEEE)
    Journal
    2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
    DOI
    10.1109/MEMSYS.2013.6474279
    ae974a485f413a2113503eed53cd6c53
    10.1109/MEMSYS.2013.6474279
    Scopus Count
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