Type
Conference PaperDate
2013-01Permanent link to this record
http://hdl.handle.net/10754/597883
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FeNi3 based core-shell magnetic nanoparticles are demonstrated as the magnetic core material for on-chip, radio frequency (RF) inductors. FeNi3 nanoparticles with 50-150 nm in diameter with 15-20 nm-thick SiO2 coating are chemically synthesized and deposited on a planar inductor as the magnetic core to enhance both inductance (L) and quality factor (Q) of the inductor. Experimentally, the ferromagnetic resonant frequency of the on-chip inductors based on FeNi3 core-shell nanoparticles has been shown to be over several GHz. A post-CMOS process has been developed to integrate the magnetic nanoparticles to a planar inductor and inductance enhancements up to 50% of the original magnitude with slightly enhanced Q-factor up to 1 GHz have been achieved. © 2013 IEEE.Citation
Koh K, Park J, Park J, Zhu X, Lin L (2013) Core-shell magnetic nanoparticles for on-chip RF inductors. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). Available: http://dx.doi.org/10.1109/MEMSYS.2013.6474279.Sponsors
This work was supported in part by an Academic Excellence Alliance grant awarded by the KAUST (King Abdullah University of Science and Technology) Office of Competitive Research Fund, the DARPA N/MEMS program and a SRC (Semiconductor Research Corporation) grant. The authors would like to thank Dr. Kevin O'Brien, Jun-Chau Chien and Chia Meng Chen for valuable discussions.ae974a485f413a2113503eed53cd6c53
10.1109/MEMSYS.2013.6474279