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    Nanoscale microwave microscopy using shielded cantilever probes

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    art3A10.10072Fs13204-011-0002-7.pdf
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    Type
    Article
    Authors
    Lai, Keji
    Kundhikanjana, Worasom
    Kelly, Michael A.
    Shen, Zhi-Xun
    KAUST Grant Number
    KUS-F1-033-02
    Date
    2011-04-21
    Online Publication Date
    2011-04-21
    Print Publication Date
    2011-05
    Permanent link to this record
    http://hdl.handle.net/10754/597004
    
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    Abstract
    Quantitative dielectric and conductivity mapping in the nanoscale is highly desirable for many research disciplines, but difficult to achieve through conventional transport or established microscopy techniques. Taking advantage of the micro-fabrication technology, we have developed cantilever-based near-field microwave probes with shielded structures. Sensitive microwave electronics and finite-element analysis modeling are also utilized for quantitative electrical imaging. The system is fully compatible with atomic force microscope platforms for convenient operation and easy integration of other modes and functions. The microscope is ideal for interdisciplinary research, with demonstrated examples in nano electronics, physics, material science, and biology.
    Citation
    Lai K, Kundhikanjana W, Kelly MA, Shen Z-X (2011) Nanoscale microwave microscopy using shielded cantilever probes. Applied Nanoscience 1: 13–18. Available: http://dx.doi.org/10.1007/s13204-011-0002-7.
    Sponsors
    This work is supported by Award No. KUS-F1-033-02, made by King Abdullah University of Science and Technology (KAUST) under the global research partnership (GRP) program. Additional supports are from Center of Probing the Nanoscale (CPN), Stanford University, a gift grant of Agilent Technologies, Inc., NSF Grant DMR-0906027, and DOE under Contract Nos. DE-FG03-01ER45929-A001 and DE-FG36-08GOI8004. CPN is an NSF NSEC, NSF Grant No. PHY-0425897.
    Publisher
    Springer Nature
    Journal
    Applied Nanoscience
    DOI
    10.1007/s13204-011-0002-7
    ae974a485f413a2113503eed53cd6c53
    10.1007/s13204-011-0002-7
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    Publications Acknowledging KAUST Support

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