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dc.contributor.authorRamini, Abdallah
dc.contributor.authorBellaredj, Mohammed Lamine Faycal
dc.contributor.authorHafiz, Md Abdullah Al
dc.contributor.authorYounis, Mohammad I.
dc.date.accessioned2016-02-10T12:48:11Z
dc.date.available2016-02-10T12:48:11Z
dc.date.issued2015-12-11
dc.identifier.citationRamini, A., Bellaredj, M. L. F., Al Hafiz, M. A., & Younis, M. I. (2015). Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation. Journal of Micromechanics and Microengineering, 26(1), 015012. doi:10.1088/0960-1317/26/1/015012
dc.identifier.doi10.1088/0960-1317/26/1/015012
dc.identifier.urihttp://hdl.handle.net/10754/596016
dc.description.abstractWe present an experimental investigation for the nonlinear dynamic behaviors of clamped–clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.
dc.language.isoen
dc.publisherIOP Publishing
dc.relation.urlhttp://http://iopscience.iop.org/article/10.1088/0960-1317/26/1/015012/meta
dc.subjectMechanical resonator
dc.subjectsnap through
dc.titleExperimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation
dc.typeArticle
dc.contributor.departmentMechanical Engineering Program
dc.contributor.departmentPhysical Science and Engineering (PSE) Division
dc.identifier.journalJournal of Micromechanics and Microengineering
dc.eprint.versionPost-print
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)
kaust.personRamini, Abdallah
kaust.personBellaredj, Mohammed Lamine Faycal
kaust.personHafiz, Md Abdullah Al
kaust.personYounis, Mohammad I.
refterms.dateFOA2018-06-13T11:59:04Z
dc.date.published-online2015-12-11
dc.date.published-print2016-01-01


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